Hybrid Integration of Deterministic Quantum Dot-Based Single-Photon Sources with CMOS-Compatible Silicon Carbide Photonics

Zhu, Yifan1,2; Wei, Wenqi3; Yi, Ailun1; Jin, Tingting2; Shen, Chen1,4,5; Wang, Xudong1,2; Zhou, Liping1,2; Wang, Chengli1,2; Ou, Weiwen1; Song, Sannian1,2; Wang, Ting2,3; Zhang, Jianjun2; Ou, Xin1,2; Zhang, Jiaxiang1,2,3

2022-06-01

10.1002/lpor.202200172

Laser & Photonics Reviews   影响因子和分区

1863-8880

1863-8899

Thin film 4H-silicon carbide (4H-SiC) is emerging as a contender for realizing large-scale optical quantum circuits due to its high CMOS technology compatibility and large optical nonlinearities. Though, challenges remain in producing wafer-scale 4H-SiC thin film on insulator (4H-SiCOI) for dense integration of photonic circuits, and in efficient coupling of deterministic quantum emitters that are essential for scalable quantum photonics. Here, hybrid integration of self-assembled InGaAs quantum dot (QD)-based single-photon sources (SPSs) with wafer-scale 4H-SiC photonic chips prepared by ion slicing technique is demonstrated. By designing a bilayer vertical coupler, generation and highly efficient routing of single-photon emission in the hybrid quantum photonic chip are realized. Furthermore, a chip-integrated beamsplitter operation for triggered single photons through fabricating a 1 x 2 multimode interferometer (MMI) with a symmetric power splitting ratio of 50:50 is realized. The successful demonstration of heterogeneously integrating QD-based SPSs on 4H-SiC photonic chip prepared by ion slicing technique constitutes an important step toward CMOS-compatible, fast reconfigurable quantum photonic circuits with deterministic SPSs.

hybrid integration multimode interference beamsplitter self-assembled quantum dots silicon carbide photonics single-photon sources

SCI ; EI

英语

其他

National Key R&D Program of China["2017YFE0131300","2019YFB1803901"] ; Science and Technology Commission of Shanghai Municipality["20JC1416200","16ZR1442600"] ; Shanghai Rising-Star Program[19QA1410600] ; Shanghai Municipal Science and Technology Major Project[2017SHZDZX03] ; Program of Shanghai Academic/Technology Research Leader[19XD1404600] ; National Natural Science Foundation of China[12074400,"U1732268",61874128,61851406,11705262] ; Frontier Science Key Program of Chinese Academy of Sciences[QYZDY-SSW-JSC032]

Optics ; Physics

Optics ; Physics, Applied ; Physics, Condensed Matter

WOS:000812879600001

WILEY-V C H VERLAG GMBH

20222512249025

CMOS integrated circuits ; Film preparation ; Integration ; Interferometers ; Nanocrystals ; Nonlinear optics ; Particle beams ; Photonic devices ; Photons ; Semiconducting indium gallium arsenide ; Semiconductor alloys ; Silicon carbide ; Silicon photonics ; Silicon wafers ; Thin films

Semiconducting Materials:712.1 ; Compound Semiconducting Materials:712.1.2 ; Semiconductor Devices and Integrated Circuits:714.2 ; Light/Optics:741.1 ; Nonlinear Optics:741.1.1 ; Optical Devices and Systems:741.3 ; Nanotechnology:761 ; Inorganic Compounds:804.2 ; Calculus:921.2 ; Atomic and Molecular Physics:931.3 ; High Energy Physics:932.1 ; Crystalline Solids:933.1 ; Optical Instruments:941.3

Web of Science

1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Funct Mat Informat, Shanghai 200092, Peoples R China
2.Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
3.Chinese Acad Sci, Inst Phys, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China
4.Southern Univ Sci & Technol, Inst Quantum Sci & Engn, Shenzhen 518055, Peoples R China
5.Southern Univ Sci & Technol, Dept Phys, Shenzhen 518055, Peoples R China

Zhu, Yifan,Wei, Wenqi,Yi, Ailun,et al. Hybrid Integration of Deterministic Quantum Dot-Based Single-Photon Sources with CMOS-Compatible Silicon Carbide Photonics[J]. Laser & Photonics Reviews,2022,16.

Zhu, Yifan.,Wei, Wenqi.,Yi, Ailun.,Jin, Tingting.,Shen, Chen.,...&Zhang, Jiaxiang.(2022).Hybrid Integration of Deterministic Quantum Dot-Based Single-Photon Sources with CMOS-Compatible Silicon Carbide Photonics.Laser & Photonics Reviews,16.

Zhu, Yifan,et al."Hybrid Integration of Deterministic Quantum Dot-Based Single-Photon Sources with CMOS-Compatible Silicon Carbide Photonics".Laser & Photonics Reviews 16(2022).