Theoretical and experimental study on plasma-induced atom-migration manufacturing (PAMM) of glass

Liang，Shaoxiang; Zhang，Linfeng; Deng，Hui

2022-10-15

10.1016/j.apsusc.2022.153976

APPLIED SURFACE SCIENCE   影响因子和分区

0169-4332

1873-5584

Optical manufacturing plays an important role in various fields, such as optical lenses, telescopes, and laser optics. Generally, traditional optical manufacturing techniques are all subtractive processes based on the micro-shearing effect between the tool and surface protrusions. This paper reports a plasma-induced atom migration manufacturing (PAMM) process, which is a nonsubtractive finishing approach by which angstrom level surface roughness of fused silica has been successfully achieved. Inductively coupled plasma (ICP), which is characterized by high temperature and high radical density, is used as the tool of PAMM. After obtaining instantaneous plasma energy input on the fused silica surface, the peak site atoms migrate to the valley sites, thereby reducing the roughness. According to the energy minimization principle, this migration process continues until an ultra-smooth surface with reduced surface energy is formed. Atomic-scale molecular dynamics simulations were performed to clarify the microscopic mechanisms of PAMM, and experiments were conducted to verify its smoothing capability. The roughness of a ground silica surface was drastically reduced from Sa 391 nm to Sa 0.16 nm. This study demonstrates the feasibility of the PAMM as an alternative approach for atomic-level surface manufacturing.

Atom migration Atomic and close-to-atomic scale manufacturing Finishing Plasma Roughness

SCI ; EI

英语

第一 ; 通讯

National Natural Science Foundation of China[52005243];National Natural Science Foundation of China[52035009];

Chemistry ; Materials Science ; Physics

Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter

WOS:000817179800004

ELSEVIER

20222612279224

Atoms ; Fused silica ; Inductively coupled plasma ; Lenses ; Manufacture ; Molecular dynamics

Heat Treatment Processes:537.1 ; Optical Devices and Systems:741.3 ; Physical Chemistry:801.4 ; Glass:812.3 ; Manufacturing:913.4 ; Physical Properties of Gases, Liquids and Solids:931.2 ; Atomic and Molecular Physics:931.3 ; Plasma Physics:932.3

MATERIALS SCIENCE

2-s2.0-85132691131

Scopus

Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen,Guangdong,518055,China

Liang，Shaoxiang,Zhang，Linfeng,Deng，Hui. Theoretical and experimental study on plasma-induced atom-migration manufacturing (PAMM) of glass[J]. APPLIED SURFACE SCIENCE,2022,599.

Liang，Shaoxiang,Zhang，Linfeng,&Deng，Hui.(2022).Theoretical and experimental study on plasma-induced atom-migration manufacturing (PAMM) of glass.APPLIED SURFACE SCIENCE,599.

Liang，Shaoxiang,et al."Theoretical and experimental study on plasma-induced atom-migration manufacturing (PAMM) of glass".APPLIED SURFACE SCIENCE 599(2022).