Nanoimprinting Technology Applied on Display Devices

Jiang，Junnan1,2; Chen，Rong3; Zhao，Zuzhen1

10.1002/SDTP.13434

2019

0097-966X

2168-0159

Digest of Technical Papers - SID International Symposium

50

S1

187-189

This paper demonstrates a roll-to-roll nanoimprinting process for the mass production of structured films used on display devices. Nanoimprint lithography is one of the novel techniques for nanofabrication. It is especially suitable for mass production due to its high throughput with comparable resolutions to photoand e-beam lithography. In this work, it is applied to the production of e-ink film that has “microcups” to fill in e-ink pigments. The dimensions of the microcups could be adjusted by designing stamp geometries. With several flexible stamps joint together to a sleeve on the roller, this nanoimprinting process could be extended to a roll-to-roll equipment. For mass production of structured films, the pattern transfer quality should be consistent with very low defect rates. This is to be achieved by improving the materials for resist and stamp, the nanoimprinting conditions and sleeve fabrication, etc.

E-ink Electroforming Nanoimprinting Roll to roll Uv resist

其他

英语

EI

20222912373608

Nanoimprint lithography ; Throughput

Computer Peripheral Equipment:722.2 ; Reproduction, Copying:745.2 ; Nanotechnology:761 ; Solid State Physics:933

2-s2.0-85134205024

Scopus

1.Research Centre for Optoelectronic Materials,Research Institute of Tsinghua University in Shenzhen,
2.Department of Materials,Southern University of Science and Technology,Shenzhen,China
3.AV-Display Co.,Ltd,Shenzhen,China

Jiang，Junnan,Chen，Rong,Zhao，Zuzhen. Nanoimprinting Technology Applied on Display Devices[C],2019:187-189.