一种表面具有纳米金刚石薄膜涂层的PCBN刀具及其制备方法

本发明提供了一种表面具有纳米金刚石薄膜涂层的PCBN刀具及其制备方法，所述制备方法包括以下步骤：将预处理后的PCBN刀具在纳米金刚石粉中进行干抛至光亮，然后置于基台上，放入微波等离子体化学气相沉积系统中抽真空，抽真空后通入第一反应源气体；开启微波等离子体化学气相沉积系统，微波激发第一反应源气体产生等离子体球，然后通入第二反应源气体开始沉积，沉积完成后得到表面具有纳米金刚石薄膜涂层的PCBN刀具；所述制备方法优化了微波等离子体化学气相沉积工艺，通过调控制备条件，在刀具表面均匀沉积纳米级金刚石涂层，有效提高了金刚石涂层的薄膜质量与稳定性，延长了刀具的使用寿命，具有较好的工业化应用前景。

The invention provides a PCBN cutter with a nano diamond film coating on the surface and a preparation method of the PCBN cutter. The preparation method comprises the following steps that the pretreated PCBN cutter is subjected to dry polishing in nano-diamond powder to be bright and then placed on a base station, the base station is placed in a microwave plasma chemical vapor deposition system to be vacuumized, vacuumizing is conducted, and then a first reaction source gas is introduced; and the microwave plasma chemical vapor deposition system is started, the first reaction source gas is excited by microwaves to generate plasma balls, then a second reaction source gas is introduced to start deposition, and the PCBN cutter with the nano-diamond film coating on the surface is obtained after deposition is completed. According to the preparation method, the microwave plasma chemical vapor deposition process is optimized, the nano-scale diamond coating is uniformly deposited on the surface of the cutter by regulating and controlling preparation conditions, the film quality and stability of the diamond coating are effectively improved, the service life of the cutter is prolonged, and the preparation method has good industrial application prospects.