南方科技大学知识苑(SUSTech KC): Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters

题名	Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters
作者	Li, Mingjie; Luo, Anxin; Luo, Wenxin; Wang, Fei
通讯作者	Wang, Fei
发表日期	2022-08-01
DOI	10.1109/JMEMS.2022.3194859
发表期刊	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 影响因子和分区
ISSN	1057-7157
EISSN	1941-0158
卷号	PP 期号:99页码:1-15
摘要	In recent years, self-powered energy harvesting technology has been widely studied, which may provide supplementary power for wireless sensing networks with low power consumptions. The energy harvester could reduce the use of conventional power supply of batteries, and even eliminate the challenge of battery replacement for large scale networks. In this review, the fundamentals and theories of energy conversion from mechanical vibration to electrical current via variable capacitor are introduced, followed by the discussion of frequency bandwidth broadening, structural parameters, such as surface potential, initial air gap, and stopper heights, as the aspects for controlling squeeze-film air damping force and the output power. Representative examples of the design optimizations of vacuum operating pressure and perforated holes on bottom electrode are presented. Also, special electret processing and built-in corona needles for enhanced space charge stability and self-recharging capability are briefed. This review can provide the research community with a better understanding of the MEMS-compatible electrostatic vibration energy harvester, and further facilitate its development for future potential applications. 2022-0089
关键词	Vibrations Electrets Electrodes Electrostatics Capacitance Force Damping Energy harvester microelectromechanical systems (MEMS) electrets air damping pull-in effect
相关链接	[来源记录]
收录类别	SCI ; EI
语种	英语
学校署名	第一 ; 通讯
资助项目	National Science Foundation of China[62174077] ; Shenzhen Science and Technology Innovation Committee["JCYJ20200109105838951","K21799109","K21799110"]
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
WOS类目	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied
WOS记录号	WOS:000842053400001
出版者	IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
EI入藏号	20223512676972
EI主题词	Dissociation ; Electrets ; Electric power systems ; Electrodes ; Electromechanical devices ; Electrostatic generators ; Electrostatics ; Energy harvesting ; Low power electronics ; MEMS ; Secondary batteries ; Vibrations (mechanical)
EI分类号	Energy Conversion Issues:525.5 ; Electricity: Basic Concepts and Phenomena:701.1 ; Secondary Batteries:702.1.2 ; Electric Equipment:704.2 ; Electric Power Systems:706.1 ; Dielectric Materials:708.1 ; Chemical Reactions:802.2 ; Mechanics:931.1
ESI学科分类	ENGINEERING
来源库	Web of Science
全文链接	https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9855862
引用统计	被引频次[WOS]：24
成果类型	期刊论文
条目标识符	http://sustech.caswiz.com/handle/2SGJ60CL/394155
专题	工学院_深港微电子学院
作者单位	Southern Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China
第一作者单位	深港微电子学院
通讯作者单位	深港微电子学院
第一作者的第一单位	深港微电子学院
推荐引用方式 GB/T 7714	Li, Mingjie,Luo, Anxin,Luo, Wenxin,et al. Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2022,PP(99):1-15.
APA	Li, Mingjie,Luo, Anxin,Luo, Wenxin,&Wang, Fei.(2022).Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,PP(99),1-15.
MLA	Li, Mingjie,et al."Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS PP.99(2022):1-15.