南方科技大学知识苑(SUSTech KC): Surface metrology by multiple-wavelength coherent modulation imaging

题名	Surface metrology by multiple-wavelength coherent modulation imaging
作者	Yi, Jianji ; Zhao, Jiangtao ; Wang, Bingyang ; Wang, Yanfang ; Zhang, Fucai1
通讯作者	Zhang, Fucai
发表日期	2022-08-20
DOI	10.1364/AO.468571
发表期刊	APPLIED OPTICS 影响因子和分区
ISSN	1559-128X
EISSN	2155-3165
卷号	61 期号:24页码:7218-7224
摘要	With the rapid progress of advanced manufacturing, three-dimensional metrology techniques that are able to achieve nanometer spatial resolution and to capture fast dynamics are highly desired, for which a snapshot ability and a common-light-path setup are required. Commonly used off-axis holography and phase-shifting interferometry are short in fulfilling those requirements. We studied the suitability and performance of the coherent modulation imaging (CMI) method for metrology applications. Both transparent and reflective samples are measured in visible light experiments. Thanks to its ability to retrieve separate wavefronts at different wavelengths from a single measurement, CMI allows for attaining an enlarged range of measurement free from phase wrapping by utilizing the concept of synthetic wavelength. The CMI method fulfills well the requirements for advanced metrology and can be implemented at any wavelength. We expect it would be a powerful addition to the pool of advanced metrology tools. (C) 2022 Optica Publishing Group
相关链接	[来源记录]
收录类别	SCI ; EI
语种	英语
学校署名	通讯
资助项目	Shenzhen Key Laboratory of Robotics Perception and Intelligence[ZDSYS20200810171800001] ; National Natural Science Foundation of China["11775105","12074167"] ; Shenzhen Science and Technology Program[KQTD20170810110313773] ; Centers for Mechanical Engineering Research and Education at MIT and SUSTech[6941806]
WOS研究方向	Optics
WOS类目	Optics
WOS记录号	WOS:000843576700033
出版者	Optica Publishing Group
EI入藏号	20223712737075
EI主题词	Holography ; Light
EI分类号	Light/Optics:741.1 ; Holography:743 ; Imaging Techniques:746
ESI学科分类	PHYSICS
来源库	Web of Science
引用统计	被引频次[WOS]：1
成果类型	期刊论文
条目标识符	http://sustech.caswiz.com/handle/2SGJ60CL/394243
专题	工学院_电子与电气工程系
作者单位	1.Southern Univ Sci & Technol, Shenzhen Key Lab Robot Percept & Intelligence, Shenzhen 518055, Peoples R China 2.Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen 518055, Peoples R China
通讯作者单位	南方科技大学
推荐引用方式 GB/T 7714	Yi, Jianji,Zhao, Jiangtao,Wang, Bingyang,et al. Surface metrology by multiple-wavelength coherent modulation imaging[J]. APPLIED OPTICS,2022,61(24):7218-7224.
APA	Yi, Jianji,Zhao, Jiangtao,Wang, Bingyang,Wang, Yanfang,&Zhang, Fucai.(2022).Surface metrology by multiple-wavelength coherent modulation imaging.APPLIED OPTICS,61(24),7218-7224.
MLA	Yi, Jianji,et al."Surface metrology by multiple-wavelength coherent modulation imaging".APPLIED OPTICS 61.24(2022):7218-7224.