Interface Engineering in Chip-Scale GaN Optical Devices for Near-Hysteresis-Free Hydraulic Pressure Sensing

Yu, Binlu; Luo, Yumeng; Li, Jing; Ye, Huaiyu; Li, Kwai Hei

2022-08-24

10.1021/acsami.2c0929138351

ACS Applied Materials & Interfaces   影响因子和分区

1944-8244

1944-8252

In this work, a compact, near-hysteresis-free hydraulic pressure sensor is presented through interface engineering in a GaN chipscale optical device. The sensor consists of a monolithic GaN-on-sapphire device responsible for light emission and detection and a multilevel microstructured polydimethylsiloxane (PDMS) film prepared through a low-cost molding process using sandpaper as a template. The micropatterned PDMS film functions as a pressure-sensing medium to effectively modulate the reflectance properties at the sapphire interface during pressure loading and unloading. The interface engineering endows the GaN optical device with near-hysteresis-free performance over a wide pressure range of up to 0-800 kPa. Verified by a series of experimental measurements on its dynamic responses, the tiny hydraulic sensor exhibits superior performance in hysteresis, stability, repeatability, and response time, indicating its considerable potential for a broad range of practical applications.

GaN near-hysteresis-free interface engineering hydraulic pressure sensing optical device

SCI

英语

第一 ; 通讯

National Natural Science Foundation of China["62004088","12074170"] ; Shenzhen Natural Science Foundation Stability Support Program Project[20200925160044004] ; NSQKJJ[K20799112]

Science & Technology - Other Topics ; Materials Science

Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary

WOS:000847846500001

AMER CHEMICAL SOC

Web of Science

Southern Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China

Yu, Binlu,Luo, Yumeng,Li, Jing,et al. Interface Engineering in Chip-Scale GaN Optical Devices for Near-Hysteresis-Free Hydraulic Pressure Sensing[J]. ACS Applied Materials & Interfaces,2022,14(33).

Yu, Binlu,Luo, Yumeng,Li, Jing,Ye, Huaiyu,&Li, Kwai Hei.(2022).Interface Engineering in Chip-Scale GaN Optical Devices for Near-Hysteresis-Free Hydraulic Pressure Sensing.ACS Applied Materials & Interfaces,14(33).

Yu, Binlu,et al."Interface Engineering in Chip-Scale GaN Optical Devices for Near-Hysteresis-Free Hydraulic Pressure Sensing".ACS Applied Materials & Interfaces 14.33(2022).