一种全固态薄膜锂电池及其制备方法

一种全固态薄膜锂电池及其制备方法，属于锂离子电池技术领域。全固态薄膜锂电池的制备方法，包括：依次进行的薄膜基板的供给操作和对薄膜基板的溅射操作。其中，薄膜基板的供给操作和溅射操作包括：在同时存在第一电子集流体靶材、第一电极靶材、锂镧锆钽氧靶材以及第二电极靶材的第一真空环境中，通过磁控溅射的方式在衬底基片上依次沉积形成叠层设置的第一电子集流体薄膜、第一电极薄膜、锂镧锆钽氧薄膜以及第二电极薄膜。利用该制备方法，能够解决锂镧锆钽氧薄膜与电极薄膜之间固‑固界面接触较差的问题，并且能够通过原位生长制备出厚度可控的致密薄膜材料，以提高制备得到的全固态薄膜锂电池的稳定性和电化学性能。

The invention discloses an all-solid-state film lithium battery and a preparation method thereof, and belongs to the technical field of lithium ion batteries. The preparation method of the all-solid-state thin-film lithium battery comprises the following steps of: supplying the thin-film substrate and sputtering the thin-film substrate in sequence. Wherein the supply operation and the sputtering operation of the thin film substrate comprise the following steps of: in a first vacuum environment in which a first electronic current collector target, a first electrode target, a lithium lanthanum zirconium tantalum oxide target and a second electrode target exist at the same time; a first electronic current collector thin film, a first electrode thin film, a lithium lanthanum zirconium tantalum oxide thin film and a second electrode thin film which are arranged in a laminated mode are sequentially deposited on a substrate in a magnetron sputtering mode. By utilizing the preparation method, the problem of poor solid-solid interface contact between the lithium lanthanum zirconium tantalum oxide film and the electrode film can be solved, and a compact film material with controllable thickness can be prepared through in-situ growth, so that the stability and the electrochemical performance of the prepared all-solid-state film lithium battery are improved.