南方科技大学知识苑(SUSTech KC): Wafer-Level Patterning of SnO<sub>2</sub> Nanosheets for MEMS Gas Sensors

题名	Wafer-Level Patterning of SnO₂ Nanosheets for MEMS Gas Sensors
作者	Li，Mingjie; Luo，Wenxin; Liu，Xiaojiang; Niu，Gaoqiang; Wang，Fei
发表日期	2022
DOI	10.1109/LED.2022.3204292
发表期刊	IEEE ELECTRON DEVICE LETTERS 影响因子和分区
ISSN	0741-3106
EISSN	1558-0563
卷号	PP 期号:99页码:1-1
摘要	In the past few decades, gas sensitive nanomaterials are usually deposited on specific area of the wafer by drop-casting or inkjet printing for application in gas sensor fabrication. However, wafer-level patterning of sensing materials with satisfactory reproducibility still encounters challenge. In this letter, we propose a facile ’top-down’ strategy to manufacture wafer-scale gas sensing chips with high-throughput by photolithography using a well-mixed photoresist-nanomaterial suspension, followed by calcination. The fabricated gas sensors based on the proposed approach yield excellent reproducibility and uniformity of sensing response to ethanol detection with a relative standard deviation (RSD) < 4.5 %, suggesting promising application for high-volume production of MEMS compatible gas sensors.
关键词	Ethanol ethanol sensors Fabrication Gas detectors MEMS technology Micromechanical devices patterning Resists Sensors SnO₂ nanosheets Temperature sensors
相关链接	[Scopus记录]
收录类别	EI
语种	英语
学校署名	第一
EI入藏号	20223812755497
EI主题词	Chemical detection ; Chemical sensors ; Fabrication ; Gas detectors ; Gas sensing electrodes ; Gases ; Nanosheets ; Nanostructured materials ; Photoresists
EI分类号	Semiconductor Devices and Integrated Circuits:714.2 ; Nanotechnology:761 ; Chemistry:801 ; Organic Compounds:804.1 ; Coating Materials:813.2 ; Accidents and Accident Prevention:914.1 ; Solid State Physics:933 ; Crystalline Solids:933.1 ; Special Purpose Instruments:943.3
ESI学科分类	ENGINEERING
Scopus记录号	2-s2.0-85137894798
来源库	Scopus
全文链接	https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9877900
引用统计	被引频次[WOS]：19
成果类型	期刊论文
条目标识符	http://sustech.caswiz.com/handle/2SGJ60CL/402405
专题	工学院_深港微电子学院
作者单位	School of Microelectronics, Southern University of Science and Technology, Shenzhen, China
第一作者单位	深港微电子学院
第一作者的第一单位	深港微电子学院
推荐引用方式 GB/T 7714	Li，Mingjie,Luo，Wenxin,Liu，Xiaojiang,et al. Wafer-Level Patterning of SnO₂ Nanosheets for MEMS Gas Sensors[J]. IEEE ELECTRON DEVICE LETTERS,2022,PP(99):1-1.
APA	Li，Mingjie,Luo，Wenxin,Liu，Xiaojiang,Niu，Gaoqiang,&Wang，Fei.(2022).Wafer-Level Patterning of SnO₂ Nanosheets for MEMS Gas Sensors.IEEE ELECTRON DEVICE LETTERS,PP(99),1-1.
MLA	Li，Mingjie,et al."Wafer-Level Patterning of SnO₂ Nanosheets for MEMS Gas Sensors".IEEE ELECTRON DEVICE LETTERS PP.99(2022):1-1.