Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces

Huang，Lingyu1; Xu，Kang1; Yuan，Dandan1; Hu，Jin1; Wang，Xinwei2; Xu，Shaolin1

2022-12-01

10.1038/s41467-022-33644-8

Nature Communications   影响因子和分区

2041-1723

Rigorously designed sub-micrometer structure arrays are widely used in metasurfaces for light modulation. One of the glaring restrictions is the unavailability of easily accessible fabrication methods to efficiently produce large-area and freely designed structure arrays with nanoscale resolution. We develop a patterned pulse laser lithography (PPLL) approach to create structure arrays with sub-wavelength feature resolution and periods from less than 1 μm to over 15 μm on large-area thin films with substrates under ambient conditions. Separated ultrafast laser pulses with patterned wavefront by quasi-binary phase masks rapidly create periodic ablated/modified structures by high-speed scanning. The gradient intensity boundary and circular polarization of the wavefront weaken diffraction and polarization-dependent asymmetricity effects during light propagation for high uniformity. Structural units of metasurfaces are obtained on metal and inorganic photoresist films, such as antennas, catenaries, and nanogratings. We demonstrate a large-area metasurface (10 × 10 mm) revealing excellent infrared absorption (3–7 μm), which comprises 250,000 concentric rings and takes only 5 minutes to produce.

英语

NI论文

第一 ; 通讯

2-s2.0-85139153199

Scopus

1.Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen,1088 Xueyuan Avenue,518055,China
2.Department of Mechanical Engineering,Iowa State University,Ames,50011,United States

Huang，Lingyu,Xu，Kang,Yuan，Dandan,et al. Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces[J]. Nature Communications,2022,13(1).

Huang，Lingyu,Xu，Kang,Yuan，Dandan,Hu，Jin,Wang，Xinwei,&Xu，Shaolin.(2022).Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces.Nature Communications,13(1).

Huang，Lingyu,et al."Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces".Nature Communications 13.1(2022).