南方科技大学知识苑(SUSTech KC): A 14.39ppm/kPa Stress Sensor with Low Temperature-drift and High Linearity for turbulence Stress

题名	A 14.39ppm/kPa Stress Sensor with Low Temperature-drift and High Linearity for turbulence Stress
作者	Lanxiang Xiao; Lei Chen; Fengwei An
DOI	10.1109/ICTA56932.2022.9962985
发表日期	2022
ISSN	2831-395X
ISBN	978-1-6654-9270-6
会议录名称	2022 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA)
页码	66-67
会议日期	28-30 Oct. 2022
会议地点	Xi'an, China
摘要	In the analysis and calculation of turbulent flow, the stress generated by the fluid needs to be accurately measured by sensors. In this research, a mechanical stress sensor was developed based on standard 180nm CMOS technology for real-time measurement of stress. The main contributions of this study include the following: 1) The temperature-compensated RC oscillator circuit changes mechanical stress-induced chip deformation into a frequency output. When the temperature was changed from -40°C to 120°C, the oscillator frequency only changed to 0.303Hz/ °C. 2) No complicated calibration and complicated measurement equipment are required. The chip area does not exceed 0.569 mm2. Moreover, the power consumption does not exceed 22.9 µW. 3) The average sensitivity measured by the chip is 14.39ppm/kPa, and the linear fitting curve's determination coefficient (R2) is 0.9983.
关键词	Turbulence mechanical and thermal stresses RC oscillator circuit temperature-compensation stability sensitivity
学校署名	第一
相关链接	[IEEE记录]
来源库	IEEE
全文链接	https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9962985
引用统计	被引频次[WOS]：0
成果类型	会议论文
条目标识符	http://sustech.caswiz.com/handle/2SGJ60CL/419400
专题	南方科技大学
作者单位	Southern University of Science and Technology, Shenzhen, China
第一作者单位	南方科技大学
第一作者的第一单位	南方科技大学
推荐引用方式 GB/T 7714	Lanxiang Xiao,Lei Chen,Fengwei An. A 14.39ppm/kPa Stress Sensor with Low Temperature-drift and High Linearity for turbulence Stress[C],2022:66-67.