Effect of nanoimprint on the elastic modulus of polymer microstructure

Tian, Ye1; Pang, Xiangchao2,3; Tang, Bin1,2; Cheng, Xing1

2019-11-15

10.1016/j.matlet.2019.126545

MATERIALS LETTERS   影响因子和分区

0167-577X

1873-4979

Nanoimprint, an important nanofabrication technology, is widely adopted to produce the microstructure. In this study, nanoindentation was employed to quantitatively characterize the elastic modulus of nanoimprinted poly(methyl methacrylate) (PMMA) under different conditions, with the purpose to investigate the mechanical property of the nanoimprinted microstructure suffered the ultra-high local stress and temperature. It is indicated that the elastic modulus of samples increases with the increasing the residual stress and the nanoimprint temperature. Moreover, the optical birefringence method was performed to investigate the distribution of residual stress on the microstructure. It was shown that high elastic modulus region also exhibited high residual stress. Therefore, we suggested that the temperature during the embossing process should be rigorously considered in nanoimprint process to obtain a mechanical homogeneity of imprinted structures. (C) 2019 Elsevier B.V. All rights reserved.

Polymers Elastic modulus Nanoimprint Indentation Microstructure

SCI ; EI

英语

第一 ; 通讯

Shenzhen Science and Technology Innovation Committee[JCYJ20160517160827379] ; Shenzhen Science and Technology Innovation Committee[JCYJ20170817111312887] ; Shenzhen Science and Technology Innovation Committee[ZDSYS20140509142721429]

Materials Science ; Physics

Materials Science, Multidisciplinary ; Physics, Applied

WOS:000489718500043

ELSEVIER

20193407350865

Elastic moduli ; Esters ; Indentation ; Polymers ; Residual stresses

Organic Compounds:804.1 ; Polymeric Materials:815.1 ; Materials Science:951

MATERIALS SCIENCE

Web of Science

1.Southern Univ Sci & Technol, Dept Mat Sci & Engn, Shenzhen Key Lab Nanoimprint Technol, Shenzhen 518055, Guangdong, Peoples R China
2.Southern Univ Sci & Technol, Dept Biomed Engn, Shenzhen 518055, Guangdong, Peoples R China
3.Cent South Univ Forestry & Technol, Coll Mat Sci & Engn, Changsha 410004, Hunan, Peoples R China

Tian, Ye,Pang, Xiangchao,Tang, Bin,et al. Effect of nanoimprint on the elastic modulus of polymer microstructure[J]. MATERIALS LETTERS,2019,255.

Tian, Ye,Pang, Xiangchao,Tang, Bin,&Cheng, Xing.(2019).Effect of nanoimprint on the elastic modulus of polymer microstructure.MATERIALS LETTERS,255.

Tian, Ye,et al."Effect of nanoimprint on the elastic modulus of polymer microstructure".MATERIALS LETTERS 255(2019).