Investigation of a compliant precision positioning stage with folding function

Xie, Yanlin1; Li, Yangmin1; Cheung, Chifai1; Xiao, Xiao2; Chen, Xigang1; Wang, Ruobing1

2022-12-01

10.1007/s00170-022-10410-0

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY   影响因子和分区

0268-3768

1433-3015

A foldable compliant XY precision positioning stage with good decoupling property in both axes is developed for precision applications. The compliant rolling-contact element (CORE) is innovatively incorporated in the design of the stage to realize the folding function for compacting the mechanism structure. The input stiffness of the motion platform is determined using the matrix method and is verified by a conventional stiffness modeling method. Finite element analysis (FEA) simulations of three bridge-type amplifiers are conducted and compared to determine the preferable one for magnifying the limited output displacement of the actuator. A foldable stage is then assembled and its decoupling capability and dynamic performances are investigated with the ANSYS software. In addition, a prototype is fabricated to experimentally test the performance of the stage. Results demonstrate that the employed proportional-integral-derivative (PID) feedback controller can settle in 70 ms without overshooting. The closed-loop controlled stage is able to reach a resolution of 2 mu m and has small tracking errors within +/- 1 mu m in the circular-contouring tests.

Foldable positioning stage Compliant mechanism Compliant rolling-contact element Decoupling

SCI ; EI

英语

其他

National Natural Science Foundation of China[51575544] ; ResearchCommittee of The Hong Kong Polytechnic University[RK34]

Automation & Control Systems ; Engineering

Automation & Control Systems ; Engineering, Manufacturing

WOS:000905017600001

SPRINGER LONDON LTD

20225313319654

Friction ; Proportional control systems ; Stiffness ; Stiffness matrix ; Two term control systems

Control Systems:731.1 ; Algebra:921.1 ; Mechanics:931.1 ; Materials Science:951

ENGINEERING

Web of Science

1.Hong Kong Polytech Univ, Dept Ind & Syst Engn, State Key Lab Ultra Precis Machining Technol, Hong Kong 999077, Peoples R China
2.Southern Univ Sci & Technol, Dept Elect & Elect Engn, Xueyuan Ave, Shenzhen 518055, Guangdong, Peoples R China

Xie, Yanlin,Li, Yangmin,Cheung, Chifai,et al. Investigation of a compliant precision positioning stage with folding function[J]. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY,2022,124(10):3343-3358.

Xie, Yanlin,Li, Yangmin,Cheung, Chifai,Xiao, Xiao,Chen, Xigang,&Wang, Ruobing.(2022).Investigation of a compliant precision positioning stage with folding function.INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY,124(10),3343-3358.

Xie, Yanlin,et al."Investigation of a compliant precision positioning stage with folding function".INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 124.10(2022):3343-3358.