Enhancing the optical and electrical properties of AlGaN ultraviolet-C micro-LED via a hybrid scheme of plasma and chemical treatment

Feng, Feng1; Liu, Yibo1; Zhang, Ke1; Zhanghu, Mengyuan2; Chan, Ka-Wah1; Xu, Ke3; Kwok, Hoi-Sing1; Liu, Zhaojun1,2

2022-11-28

10.1063/5.0123409

APPLIED PHYSICS LETTERS   影响因子和分区

0003-6951

1077-3118

Ultraviolet band C (UV-C) micro light-emitting diodes (micro-LEDs) provide a high energy light emission of 200-280 nm, which are brilliantly utilized in optogenetics, communications, and fluorescence. However, the limited device efficiency notably restricts the grand potential application field. In this work, three types of 20 x 20 mu m(2) UV-C micro-LEDs with the peak wavelength of 269 nm are fabricated by different etching strategies, including an inductively coupled plasma (ICP), post-ICP tetramethylammonium hydroxide, and a hybrid scheme combining plasma and chemical treatment. By enhancing the radiative recombination and light extraction, the hybrid scheme improves the peak external quantum efficiency of UV-C micro-LEDs to 3.45%, an elevation of 57.5% compared with ICP. A step advance in the forward injection current and ideality factor is also found on the devices fabricated by the hybrid scheme due to better contact on the AlGaN surface.

SCI

英语

NI论文

通讯

Key-Area Research and Development Program of Guangdong Province[2019B010925001] ; State Key Laboratory of Advanced Displays and Optoelectronics[VPRGO13EG02]

Physics

Physics, Applied

WOS:000912601000001

AIP Publishing

PHYSICS

Web of Science

1.Hong Kong Univ Sci & Technol, State Key Lab Adv Displays & Optoelect Technol, Hong Kong, Peoples R China
2.Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen 518055, Peoples R China
3.Chinese Acad Sci, Suzhou Inst Nanotech & Nanob, Dept Platform Characterizat & Test, Suzhou, Peoples R China

Feng, Feng,Liu, Yibo,Zhang, Ke,et al. Enhancing the optical and electrical properties of AlGaN ultraviolet-C micro-LED via a hybrid scheme of plasma and chemical treatment[J]. APPLIED PHYSICS LETTERS,2022,121(22).

Feng, Feng.,Liu, Yibo.,Zhang, Ke.,Zhanghu, Mengyuan.,Chan, Ka-Wah.,...&Liu, Zhaojun.(2022).Enhancing the optical and electrical properties of AlGaN ultraviolet-C micro-LED via a hybrid scheme of plasma and chemical treatment.APPLIED PHYSICS LETTERS,121(22).

Feng, Feng,et al."Enhancing the optical and electrical properties of AlGaN ultraviolet-C micro-LED via a hybrid scheme of plasma and chemical treatment".APPLIED PHYSICS LETTERS 121.22(2022).