Electret Based Vibration Energy Harvester with Self-Healable Surface Charge

Zhang，Yulong; Hu，Yushen; Wang，Meihua; Wang，Fei

10.1109/MEMSYS.2019.8870794

2019

1084-6999

978-1-7281-1611-2

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2019-January

1013-1016

27-31 Jan. 2019

Seoul, Korea, Republic of

345 E 47TH ST, NEW YORK, NY 10017 USA

Institute of Electrical and Electronics Engineers Inc.

In this paper, we propose an electrostatic vibration energy harvester (e-VEH) with self-healable surface charge of electret. The device is made of a sandwich structure with out-of-the-plane gap closing scheme. Nine tungsten corona tips with tip diameter of 5\ \mu \mathrm{m} are assembled into the device. With a corona charging setup self-powered by the part of the harvested energy of the e-VEH, the electret can be charged/recharged, which would solve the charge decay problem for application in harsh environment. The surface potential of the electret is tested after self-healing, and an improved power output of e-VEH has been achieved with good reliability.

Electrets Corona Capacitors Vibrations Surface charging Energy harvesting Micromechanical devices

第一

英语

EI ; CPCI-S

Science, Technology and Innovation Commission of Shenzhen Municipality[KQTD2015071710313656] ; [2016A030306042] ; National Natural Science Foundation of China[51505209]

Engineering ; Science & Technology - Other Topics

Engineering, Electrical & Electronic ; Engineering, Mechanical ; Nanoscience & Nanotechnology

WOS:000541142100275

20194507624606

Electrets ; Energy harvesting ; Mechanics ; Surface charge

Energy Conversion Issues:525.5 ; Electric Equipment:704.2 ; Dielectric Materials:708.1 ; Mechanics:931.1

2-s2.0-85074343948

Scopus

Southern University of Science and Technology,Shenzhen,518055,China

Zhang，Yulong,Hu，Yushen,Wang，Meihua,et al. Electret Based Vibration Energy Harvester with Self-Healable Surface Charge[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:Institute of Electrical and Electronics Engineers Inc.,2019:1013-1016.