Adhesion-Engineering-Enabled "Sketch and Peel" Lithography for Aluminum Plasmonic Nanogaps

Chen, Yiqin1; Zhang, Shi1; Shu, Zhiwen1; Wang, Zhaolong1; Liu, Peng1; Zhang, Chen1; Wang, Yasi1; Liu, Qing1; Duan, Huigao1; Liu, Yanjun2

2019-11-06

10.1002/adom.201901202

Advanced Optical Materials   影响因子和分区

2195-1071

Aluminum is one of the most significant plasmonic materials for its advantage of low cost, natural abundance, as well as the ultraviolet optical response. However, it is still very challengeable for the fabrication of aluminum plasmonic nanogaps, which greatly limits the applications of aluminum plasmonics considering the essential role of nanogaps for electric field enhancement. Here, the reliable patterning of aluminum plasmonic nanogaps employing a modified "Sketch and Peel" lithography strategy is demonstrated. By introducing a self-assembled monolayer to engineer the surface energy of the substrate, the adhesiveness of the aluminum film outside outline template is significantly decreased to implement the selective peeling process. Besides, the near-infrared Fano resonance in the periodic aluminum heptamers has been first revealed by enabling the strong electric field and plasmon coupling in the aluminum nanostructures with 10 nm scale nanogaps. In addition, surface-enhanced Raman spectroscopy and infrared spectroscopy are also illustrated in the rationally designed aluminum dimers. The present work provides a robust method to obtain aluminum plasmonic nanogaps, which may play an important role on the practical applications of aluminum plasmonics, such as surface-enhanced vibration spectroscopy and nonlinear optics.

adhesion engineering aluminum plasmonics plasmonic nanogaps "Sketch and Peel" lithography surface-enhanced spectroscopy

SCI ; EI

英语

其他

National Natural Science Foundation of China[51722503] ; National Natural Science Foundation of China[51621004] ; National Natural Science Foundation of China[51805160] ; National Natural Science Foundation of China[11574078]

Materials Science ; Optics

Materials Science, Multidisciplinary ; Optics

WOS:000494618000001

WILEY-V C H VERLAG GMBH

20194607686435

Adhesion ; Adhesives ; Electric fields ; Infrared devices ; Infrared spectroscopy ; Lithography ; Nanostructures ; Nonlinear optics ; Plasmonics ; Raman spectroscopy ; Self assembled monolayers

Aluminum:541.1 ; Electricity: Basic Concepts and Phenomena:701.1 ; Nonlinear Optics:741.1.1 ; Nanotechnology:761 ; Solid State Physics:933 ; Materials Science:951

Web of Science

1.Hunan Univ, Coll Mech & Vehicle Engn, State Key Lab Adv Design & Mfg Vehicle Body, Changsha 410082, Hunan, Peoples R China
2.Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen 518055, Peoples R China

Chen, Yiqin,Zhang, Shi,Shu, Zhiwen,et al. Adhesion-Engineering-Enabled "Sketch and Peel" Lithography for Aluminum Plasmonic Nanogaps[J]. Advanced Optical Materials,2019,8(2).

Chen, Yiqin.,Zhang, Shi.,Shu, Zhiwen.,Wang, Zhaolong.,Liu, Peng.,...&Liu, Yanjun.(2019).Adhesion-Engineering-Enabled "Sketch and Peel" Lithography for Aluminum Plasmonic Nanogaps.Advanced Optical Materials,8(2).

Chen, Yiqin,et al."Adhesion-Engineering-Enabled "Sketch and Peel" Lithography for Aluminum Plasmonic Nanogaps".Advanced Optical Materials 8.2(2019).