Multiscale micro-/nanostructures on single crystalline SiC fabricated by hybridly polarized femtosecond laser

Zheng，Jian; Huang，Jiaxu; Xu，Shaolin

2020-04-01

10.1016/j.optlaseng.2019.105940

OPTICS AND LASERS IN ENGINEERING   影响因子和分区

0143-8166

1873-0302

Hybridly polarized beam is a new type of vector beam different from conventional cylindrical vector beam. In our work, we present a simple and effective method to generate hybridly polarized beams by using a cascade of a super structured polarization converter and a quarter-wave plate. The transformation of light field was analyzed by using Jones vector and Jones matrix, and the Stokes parameters of the generated vector beams were measured to verify the states of polarization. Various novel multiscale micro-/nanostructures were fabricated on surfaces of 4H-SiC by using the hybrid vector beams, which are different from that induced by linearly polarized beam or conventional cylindrical vector beam. Experimental results show that the multiscale characteristics can be adjusted with a high degree of freedom by designing states of polarization. This research provides a new idea for preparation of multiscale micro-/nanostructures that may be useful in the fields of nano-/micro-electromechanical systems, thermal photovoltaics, and thermal management.

4H-SiC Femtosecond laser Hybrid vector beam Multiscale micro-/nanostructures

EI ; SCI

英语

第一 ; 通讯

Science and Technology Planning Project of Shenzhen Municipality[] ; National Natural Science Foundation of China[51705233]

Optics

Optics

WOS:000515214400004

Elsevier Ltd

20194607699305

Degrees of freedom (mechanics) ; Fabrication ; Femtosecond lasers ; Light polarization ; Linear transformations ; Optical devices ; Silicon carbide ; Vectors

Light/Optics:741.1 ; Optical Devices and Systems:741.3 ; Inorganic Compounds:804.2 ; Algebra:921.1 ; Mathematical Transformations:921.3 ; Mechanics:931.1

ENGINEERING

2-s2.0-85074901044

Scopus

Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen,China

Zheng，Jian,Huang，Jiaxu,Xu，Shaolin. Multiscale micro-/nanostructures on single crystalline SiC fabricated by hybridly polarized femtosecond laser[J]. OPTICS AND LASERS IN ENGINEERING,2020,127.

Zheng，Jian,Huang，Jiaxu,&Xu，Shaolin.(2020).Multiscale micro-/nanostructures on single crystalline SiC fabricated by hybridly polarized femtosecond laser.OPTICS AND LASERS IN ENGINEERING,127.

Zheng，Jian,et al."Multiscale micro-/nanostructures on single crystalline SiC fabricated by hybridly polarized femtosecond laser".OPTICS AND LASERS IN ENGINEERING 127(2020).