An Intelligent Gas Analysis System Consisting of Sensors and a Neural Network Implemented Using Thin-Film Transistors

Zong Liu1; Yushen Hu1; Gabriel E. Carranza2; Fei Wang1; Man Wong2

10.1109/MEMS49605.2023.10052572

2023

36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

1084-6999

978-1-6654-9309-3

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

2023-January

259-262

15-19 Jan. 2023

Munich, Germany

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

Described presently is an "intelligent" gas-analysis system consisting of a gas-sensor array and an artificial neural network (ANN) consisting of dual-gate thin-film transistors (TFTs) for in-system inferencing. The micro-hotplates needed for implementing gas sensors with improved specificity are constructed using a silicon-migration technology for the spontaneous creation of a suspended diaphragm. The TFTs deployed in both the array and the network sub-systems are based on semiconducting indium-gallium-zinc oxide. The two sub-systems are packaged on a printed-circuit board. The ANN infers from the raw sensor signals the identity and the concentration of the gas, thus demonstrating the feasibility of building TFT-based intelligent sensor systems.

Gas-sensor thin-film transistor indium-gallium-zinc oxide artificial neural network monolithic integration

第一

英语

CPCI-S ; EI

Science and Technology Program of Shenzhen["SGDX20190918105001787","JCYJ20200109140601691"] ; Innovation and Technology Fund[GHP/013/19SZ]

Engineering ; Science & Technology - Other Topics

Engineering, Electrical & Electronic ; Engineering, Mechanical ; Nanoscience & Nanotechnology

WOS:000975359200068

20231113731676

Chemical sensors ; Gallium compounds ; Gas detectors ; Gases ; II-VI semiconductors ; Monolithic integrated circuits ; Printed circuit boards ; Thin film circuits ; Thin film transistors ; Thin films ; Zinc oxide

Semiconducting Materials:712.1 ; Semiconductor Devices and Integrated Circuits:714.2 ; Chemistry:801 ; Inorganic Compounds:804.2 ; Accidents and Accident Prevention:914.1 ; Special Purpose Instruments:943.3

IEEE

1.Southern University of Science and Technology, China
2.The Hong Kong University of Science and Technology, Hong Kong

Zong Liu,Yushen Hu,Gabriel E. Carranza,et al. An Intelligent Gas Analysis System Consisting of Sensors and a Neural Network Implemented Using Thin-Film Transistors[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2023:259-262.