Selective Discrimination of Ppb-level Vocs Using Mos Gas Sensor in Pulse-Heating Mode with the Modified Hill's Model

Gaoqiang Niu; Yi Zhuang; Yushen Hu; Zong Liu; Fei Wang

10.1109/MEMS49605.2023.10052356

2023

36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

1084-6999

978-1-6654-9309-3

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

2023-January

826-829

15-19 Jan. 2023

Munich, Germany

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

This paper realizes the selective discrimination of ppb-level volatile organic compounds (VOCs) through a transient feature extraction method. The transient resistance of the micro-electromechanical systems (MEMS) based SnO2 sensor in ethanol at various temperature were investigated in pulse-heating mode. Furthermore, we proposed the modified Hill's model to describe the transient resistance of the sensor when the pulse is on, and the experimental data was well fitted by the function of the modified Hill's model. Additionally, various VOCs gases with 500 ppb concentrations were distinguished with the principal component analysis (PCA).

Pulse-heating MOSs gas sensor the modified Hill’s model ppb-level selectivity

第一

英语

CPCI-S ; EI

National Key R&D Program of China["2020YFB2008604","K21799109","K21799110"]

Engineering ; Science & Technology - Other Topics

Engineering, Electrical & Electronic ; Engineering, Mechanical ; Nanoscience & Nanotechnology

WOS:000975359200216

20231113731840

Gas detectors ; MEMS ; Principal component analysis

Electric Equipment:704.2 ; Organic Compounds:804.1 ; Accidents and Accident Prevention:914.1 ; Mathematical Statistics:922.2 ; Special Purpose Instruments:943.3

IEEE

School of Microelectronics, Southern University of Science and Technology, Shenzhen, China

Gaoqiang Niu,Yi Zhuang,Yushen Hu,et al. Selective Discrimination of Ppb-level Vocs Using Mos Gas Sensor in Pulse-Heating Mode with the Modified Hill's Model[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2023:826-829.