Wafer-Level Patterning of Tin Oxide Nanosheets for MEMS Gas Sensors

Mingjie Li; Wenxin Luo; Xiaojiang Liu; Gaoqiang Niu; Fei Wang

10.1109/MEMS49605.2023.10052390

2023

36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

1084-6999

978-1-6654-9309-3

2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)

2023-January

893-896

15-19 Jan. 2023

Munich, Germany

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

Gas sensing materials are typically loaded on designated area of micro-electrode via drop-casting for application in gas sensors. However, wafer-level patterning of gas sensitive materials with good reproducibility still faces challenge. In this work, we develop an effective 'top-down' approach to produce wafer-scale miniaturized gas sensing devices with high-throughput using standard photolithography of a mixture of photoresist and tin oxide (SnO2) nanomaterials suspension, followed by calcination. The prepared gas sensing chips based on the proposed method exhibited satisfactory reproducibility and uniformity of sensing response toward ethanol detection, indicating promising application for large-scale production of MEMS gas sensors.

SnO2 nanosheets patterning MEMS technology ethanol sensors

第一

英语

CPCI-S ; EI

Shenzhen Research Foundation for Postdoc[K22797503] ; National Key Research and Development Program of China["2020YFB2008604","K21799109","K21799110"]

Engineering ; Science & Technology - Other Topics

Engineering, Electrical & Electronic ; Engineering, Mechanical ; Nanoscience & Nanotechnology

WOS:000975359200233

20231113731613

Casting ; Ethanol ; Fabrication ; Gas detectors ; Gas sensing electrodes ; Gases ; MEMS ; Photoresists ; Tin oxides

Foundry Practice:534.2 ; Electric Equipment:704.2 ; Semiconductor Devices and Integrated Circuits:714.2 ; Chemistry:801 ; Organic Compounds:804.1 ; Inorganic Compounds:804.2 ; Coating Materials:813.2 ; Accidents and Accident Prevention:914.1 ; Special Purpose Instruments:943.3

IEEE

Southern University of Science and Technology, Shenzhen, China

Mingjie Li,Wenxin Luo,Xiaojiang Liu,et al. Wafer-Level Patterning of Tin Oxide Nanosheets for MEMS Gas Sensors[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2023:893-896.