Control principle of anodic discharge for enhanced performance in jet-electrochemical discharge machining of semiconductor 4H-SiC

Lu，Jiajun; Guan，Junming; Dong，Bangyan; Zhao，Yonghua

2023-04-28

10.1016/j.jmapro.2023.03.007

Journal of Manufacturing Processes   影响因子和分区

1526-6125

2212-4616

Implementing anode discharge into electrochemical jet machining (EJM) makes it possible to process semiconductor material 4H-SiC. However, the characteristics and control principle of anodic discharge behavior in EJM remains unclear, while it significantly influences material removal and EJM precision. The present study reveals discharge behavior and its impact on material removal by controlling the imposed electrical and chemical conditions. The physicochemical properties and spatiotemporal distribution of discharges are discussed by analyzing the plasma region's temperature, luminescence, and material removal fashion. The findings reveal that discharges are preferentially ignited in certain areas where the current density is concentrated. The discharge intensity and location are controllable by the pulse cycle and electrical field distribution inside the jet (i.e., changing the jet angle). Reducing pulse duration leads to more localized and mild discharges, improving machining precision. A gas ionization-dominated anodic discharge model is proposed. Both discharge and electrolyte types exert significant influence on material removal. Using a DC supply provides a maximum machining rate of 1.44 mm/min. Meanwhile, an optimal surface finish Ra 170 nm and high shape precision with no overcut is achievable by applying high-frequency AC of 1000 Hz.

Anodic discharge characteristics Electrolyte chemistry Jet-electrochemical discharge machining Material removal mechanism Semiconductor 4H-SiC

SCI ; EI

英语

第一 ; 通讯

National Key Research and Devel- opment Program of China[2021YFF0501700] ; Na- tional Natural Science Foundation of China[51905255] ; Shenzhen Science and Technology Program[GJHZ20200731095204014] ; Shenzhen Science and Technology Innovation Commission[JCYJ20190809143217193]

Engineering

Engineering, Manufacturing

WOS:000951735400001

ELSEVIER SCI LTD

20231213745679

Electric discharges ; Electrolytes ; Ionization of gases ; Magnetic semiconductors ; Physicochemical properties ; Wide band gap semiconductors

Electricity: Basic Concepts and Phenomena:701.1 ; Electric Batteries and Fuel Cells:702 ; Magnetic Materials:708.4 ; Semiconducting Materials:712.1 ; Physical Chemistry:801.4 ; Chemical Reactions:802.2 ; Chemical Agents and Basic Industrial Chemicals:803 ; Chemical Products Generally:804 ; Inorganic Compounds:804.2

2-s2.0-85150022721

Scopus

Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen,518055,China

Lu，Jiajun,Guan，Junming,Dong，Bangyan,et al. Control principle of anodic discharge for enhanced performance in jet-electrochemical discharge machining of semiconductor 4H-SiC[J]. Journal of Manufacturing Processes,2023,92:435-452.

Lu，Jiajun,Guan，Junming,Dong，Bangyan,&Zhao，Yonghua.(2023).Control principle of anodic discharge for enhanced performance in jet-electrochemical discharge machining of semiconductor 4H-SiC.Journal of Manufacturing Processes,92,435-452.

Lu，Jiajun,et al."Control principle of anodic discharge for enhanced performance in jet-electrochemical discharge machining of semiconductor 4H-SiC".Journal of Manufacturing Processes 92(2023):435-452.