用于极紫外光刻机的反射镜及极紫外光线收集方法

本发明公开了一种用于极紫外光刻机的反射镜及极紫外光线收集方法，所述反射镜包括：底座，所述底座上设有阵列分布的安装孔；若干个多层膜镜片，所述多层膜镜片可拆卸安装在所述安装孔内；所述底座上沿所述安装孔的周边还间隔设置有多个出气口，所述出气口被配置为当氢气从所述出气口吹出时在所述多层膜镜片前形成锥台状的保护气层。与现有技术相比，本发明方案使用阵列可拆卸安装的多层膜镜片反射极紫外光线，只需要对损坏或者反射率低的单个多层膜镜片进行更换，更换成本低；并且向每个多层膜镜片的前方吹入氢气，形成锥台状保护气层，可以有效防止多层膜镜片被污染，延长多层膜镜片的使用寿命。

The invention discloses a reflector for an extreme ultraviolet lithography machine and an extreme ultraviolet light collection method, and the reflector comprises a base which is provided with installation holes distributed in an array; a plurality of multi-layer film lenses, wherein the multi-layer film lenses are detachably mounted in the mounting holes; a plurality of gas outlets are formed in the base along the periphery of the mounting hole at intervals; and the gas outlets are configured to form a frustum-shaped protective gas layer in front of the multilayer film lens when hydrogen is blown out from the gas outlets. Compared with the prior art, according to the scheme, the multi-layer film lenses which are detachably mounted in an array mode are used for reflecting the extreme ultraviolet light, only the damaged single multi-layer film lens or the single multi-layer film lens with low reflectivity needs to be replaced, and the replacement cost is low; and hydrogen is blown into the front of each multilayer film lens to form a frustum-shaped protective gas layer, so that the multilayer film lenses can be effectively prevented from being polluted, and the service life of the multilayer film lenses is prolonged.