A Compact Design and Fabrication of Optical Force Sensors Based on Integrated GaN Devices

Yumeng Luo; Gaofei Lu; Jiahao Yin; Kwai Hei Li

10.1109/ACP55869.2022.10088900

2022

2022 Asia Communications and Photonics Conference (ACP) and International Conference on Information Photonics and Optical Communications (IPOC)

2162-108X

978-1-6654-8156-4

2022 Asia Communications and Photonics Conference (ACP)

2009-2012

5-8 Nov. 2022

Shenzhen, China

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

In this work, we have designed and fabricated a miniature optical force sensor based on integrated GaN devices. The GaN device consisting of light-emitting and light-detecting units is fabricated on a GaN-on-sapphire platform through wafer-scale microfabrication, and its optical and electrical properties are thoroughly investigated. The novel integration of patterned flexible film and a 3D printing post endows the device with force-sensing capabilities. The proposed sensor adopting a compact and elegant design enables operation without external optical components, making it suitable for a wide range of portable applications.

Gallium Nitride Force Sensor Optical Integrated Device

第一 ; 通讯

英语

CPCI-S

National Natural Science Foundation of China["62004088","12074170"] ; Shenzhen Natural Science Foundation Stability Support Program Project[20200925160044004] ; NSQKJJ[K20799112]

Engineering ; Optics ; Telecommunications

Engineering, Electrical & Electronic ; Optics ; Telecommunications

WOS:001000552100520

IEEE

School of Microelectronics, Southern University of Science and Technology, Shenzhen, China

Yumeng Luo,Gaofei Lu,Jiahao Yin,et al. A Compact Design and Fabrication of Optical Force Sensors Based on Integrated GaN Devices[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2022:2009-2012.