Droplet Microsensors Based on GaN Diode Optopairs

Gaofei Lu1; Xiaoshuai An1; Yumeng Luo1; Yang Chai2; Kwai Hei Li1

10.1109/ACP55869.2022.10088713

2022

2022 Asia Communications and Photonics Conference (ACP) and International Conference on Information Photonics and Optical Communications (IPOC)

2162-108X

978-1-6654-8156-4

2022 Asia Communications and Photonics Conference (ACP)

1970-1973

5-8 Nov. 2022

Shenzhen, China

345 E 47TH ST, NEW YORK, NY 10017 USA

IEEE

In this work, the fabrication of a compact GaN-based droplet microsensor is demonstrated. The monolithic integration design of GaN diode optopairs provides the sensor with attractive properties such as miniaturization, robustness, low cost, and suitability for mass production. The sliding of water droplets across the device results in significant photocurrent changes, and the microsensor can respond to water droplet frequencies up to 3 Hz. The microsensor exhibits lightweight, low-cost, and rapid response, and has a high potential for tracking droplets in practical applications.

Gallium Nitride Optical Sensor Droplet Sensor

第一 ; 通讯

英语

CPCI-S

National Natural Science Foundation of China["62004088","12074170"]

Engineering ; Optics ; Telecommunications

Engineering, Electrical & Electronic ; Optics ; Telecommunications

WOS:001000552100509

IEEE

1.School of Microelectronics, Southern University of Science and Technology, Shenzhen, China
2.Department of Applied Physics, The Hong Kong Polytechnic University, Hong Kong, China

Gaofei Lu,Xiaoshuai An,Yumeng Luo,et al. Droplet Microsensors Based on GaN Diode Optopairs[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2022:1970-1973.