Patterned Laser Ablation of Microgrooves with Controllable Cross-Sections

Qiu, Pei1; Guo, Yang1; Huang, Lingyu1; Li, Jun1; Huang, Jiaxu1; Wang, Min2; Zhang, Zhiyu3; Xu, Shaolin1

2023-05-01

10.1002/admt.202300333

ADVANCED MATERIALS TECHNOLOGIES   影响因子和分区

2365-709X

Fabricating precision microgrooves with controllable cross-sections on difficult-to-machine materials is significantly valuable but still challenging. Herein, a patterned laser-induced microjet-assisted ablation method for cross-sectional profiles controllable laser micromachining is proposed. During the liquid-assisted laser ablation process, debris and bubbles that may disturb the laser energy deposition can be instantaneously expelled by a directional laser-induced microjet. The Gaussian laser spot is spatially modulated into specific geometric shapes, such as triangles, to tune locally deposited laser energy to carve microgrooves with designed cross-sections. To achieve customized microgrooves efficiently, a reliable geometrical model based on the ablation threshold theory is developed to guide the processing parameter selection, including the laser spot shape, polarization, pulse energy, and scanning strategies. The simulation and experimental results confirm that this method achieves the decoupled control of the groove depth and width in a single-path laser ablation process. Using this method, the design and manufacturing of microgrooves with controllable cross-sections on single crystalline silicon carbide are demonstrated. The patterned laser-induced microjet-assisted ablation method provides a new route for fabricating precision microgrooves with controllable cross-sections on difficult-to-machine materials.

beam shaping cross-sectional profile laser ablation laser-induced microjets microgrooves

SCI ; EI

英语

第一 ; 通讯

Shenzhen Science and Technology Programs["JCYJ20220818100408019","JSGG20210802154007021","KQTD20170810110250357"]

Materials Science

Materials Science, Multidisciplinary

WOS:000987100800001

WILEY

20232014103768

Crystalline materials ; Jets ; Laser theory ; Silicon carbide

Fluid Flow, General:631.1 ; Heat Transfer:641.2 ; Lasers, General:744.1 ; Laser Beam Interactions:744.8 ; Inorganic Compounds:804.2 ; Crystalline Solids:933.1

Web of Science

1.Southern Univ Sci & Technol, Dept Mech & Energy Engn, Shenzhen 518055, Peoples R China
2.Southern Univ Sci & Technol, Sch Microelect, Shenzhen 518055, Peoples R China
3.Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Key Lab Opt Syst Adv Mfg Technol, Changchun 130033, Peoples R China

Qiu, Pei,Guo, Yang,Huang, Lingyu,et al. Patterned Laser Ablation of Microgrooves with Controllable Cross-Sections[J]. ADVANCED MATERIALS TECHNOLOGIES,2023,8(15).

Qiu, Pei.,Guo, Yang.,Huang, Lingyu.,Li, Jun.,Huang, Jiaxu.,...&Xu, Shaolin.(2023).Patterned Laser Ablation of Microgrooves with Controllable Cross-Sections.ADVANCED MATERIALS TECHNOLOGIES,8(15).

Qiu, Pei,et al."Patterned Laser Ablation of Microgrooves with Controllable Cross-Sections".ADVANCED MATERIALS TECHNOLOGIES 8.15(2023).