Development of in situ characterization of two-dimensional materials grown on insulator substrates with spectroscopic photoemission and low energy electron microscopy

Zhang, Guanhua1; Liu, Lina2; Zhou, Shengxue2; Liang, Yu1,4; Sun, Julong1; Liu, Lei2; Zhou, Chuanyao1; Jiao, Liying2; Yang, Xueming1,3; Ren, Zefeng1

2023-04-01

10.1016/j.elspec.2023.147318

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA   影响因子和分区

0368-2048

1873-2526

Ultrathin two-dimensional (2D) materials offer great potential for next-generation integrated circuit and opto-electronic devices. Chemical vapor deposition (CVD)-grown 2D materials provide a way to mass production industry. However, how to in situ characterize their intrinsic electric/photoelectric properties and carrier dy-namics with electron/photoelectron probes is still a problem due to the interference from the conducting sub-strate. Here, we present a grounding Au grids method to realize in situ characterization of the CVD-grown MoS2 on the insulating thick SiO2 layer covered Si substrate with spectroscopic photoemission and low energy electron microscopy (SPELEEM). Through depositing Au grids afterwards, we have achieved good grounding of MoS2 flakes in the photoemission electron microscopy (PEEM), mirror electron microscopy (MEM), and micro-area low energy electron diffraction (mu-LEED) measurements. We have clarified the false signal caused by stray photo-electrons originated from the Au stripes, and as well as the space charge effects induced by intense photo-emission. We have also confirmed that time-resolved PEEM results are not affected by the stray signal, and adopting a small light spot, both static and time-resolved micro-area photoelectron spectroscopy (mu-PES) can unaffected by space charge effects. Our results provide a reliable way to in situ investigate 2D materials grown insulating substrates by probing photoelectrons or backscattered electrons.

Chemical vapor deposition MoS2 SiO2 Charging Au grids LEEM PEEM

SCI ; EI

英语

其他

Ministry of Science and Technology of China["2021YFA1500600","2018YFA0208700"] ; National Natural Science Foundation of China["22073097","U1832202"] ; Liaoning Provincial Natural Science Foundation Project[20170540896]

Spectroscopy

Spectroscopy

WOS:000995182900001

ELSEVIER

20231713945622

Chemical vapor deposition ; Electric grounding ; Electron microscopes ; Electron microscopy ; Gold ; Layered semiconductors ; Molybdenum compounds ; Optoelectronic devices ; Photoelectron spectroscopy ; Photoelectrons ; Photoemission ; Photons ; Silicon ; Substrates

Precious Metals:547.1 ; Nonferrous Metals and Alloys excluding Alkali and Alkaline Earth Metals:549.3 ; Electricity: Basic Concepts and Phenomena:701.1 ; Electromagnetic Waves:711 ; Semiconducting Materials:712.1 ; Light/Optics:741.1 ; Optical Devices and Systems:741.3 ; Chemical Reactions:802.2 ; Atomic and Molecular Physics:931.3

CHEMISTRY

Web of Science

1.Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China
2.Tsinghua Univ, Dept Chem, Key Lab Organ Optoelect & Mol Engn, Minist Educ, Beijing 100084, Peoples R China
3.Southern Univ Sci & Technol, Dept Chem, 1088 Xueyuan Rd, Shenzhen 518055, Guangdong, Peoples R China
4.Univ Chinese Acad Sci, 19 A Yuquan Rd, Beijing 100049, Peoples R China

Zhang, Guanhua,Liu, Lina,Zhou, Shengxue,et al. Development of in situ characterization of two-dimensional materials grown on insulator substrates with spectroscopic photoemission and low energy electron microscopy[J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA,2023,264.

Zhang, Guanhua.,Liu, Lina.,Zhou, Shengxue.,Liang, Yu.,Sun, Julong.,...&Ren, Zefeng.(2023).Development of in situ characterization of two-dimensional materials grown on insulator substrates with spectroscopic photoemission and low energy electron microscopy.JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA,264.

Zhang, Guanhua,et al."Development of in situ characterization of two-dimensional materials grown on insulator substrates with spectroscopic photoemission and low energy electron microscopy".JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA 264(2023).