激光制备相变材料微纳结构及其超表面吸收体应用研究

超表面是一种由人工亚波长结构构成的超薄二维平面材料，可实现对电磁波振幅、相位或偏振等特性的灵活调控。作为一种振幅控制型超表面，超表面吸收体可以实现在对入射光的单个波长、多个波长或是宽波段的完美或近完美吸收，在太阳能利用、光电探测、伪装、光谱学等领域有着重要应用。在对超表面的大部分研究中，其最终功能是确定的，不适用于需要动态调控光的响应的应用场合。相变材料Ge₂Sb₂Te₅（GST）调制速度快、易于集成、具有非易失性，是实现可调可重构超表面的一种较为理想的材料。飞秒激光在材料加工中具有加工精度高、热效应小等优点，可以通过诱导相变结合刻蚀方法，或是直接烧蚀方式，在相变材料表面制备出微纳结构，在低成本、高效、大面积制备相变材料超表面方面具有一定潜力。为了使得这一加工技术能够实现大面积功能器件的制备，尚需进行系统的工艺过程优化和具体的设计方案使其应用到高性能的超表面器件设计和制备中。本论文将利用飞秒激光诱导相变和烧蚀，结合材料刻蚀特性，以及激光诱导周期性表面结构，研究基于GST的多峰和宽带超表面吸收体的设计与大面积制备。本论文的主要研究内容如下：

首先，对激光诱导相变材料相变过程和随后的刻蚀过程分别进行了相变特性实验和刻蚀过程优化实验，研究了激光参数对GST相变的影响，分析了相变和刻蚀过程中可提高结构深宽比的改善方式，为后续相变材料超表面的制备提供工艺基础。对GST薄膜的在各个波段的基本光学常数进行了测量，为后续相变材料超表面吸收体的仿真设计提供理论数据。

第二，探究了激光诱导相变及烧蚀过程中飞秒激光与相变材料GST的不同作用机制。通过探究高斯光斑辐照下GST相变/烧蚀的关系及其相应的作用阈值，获取了局部辐照激光能量密度与所形成结构之间的关系，并基于所探明的激光诱导GST材料相变/烧蚀机制实现了超衍射极限加工，结合湿法刻蚀手段可在单次辐照中直接制备尺寸可控的圆环或圆盘结构。

第三，以所制备的超衍射极限圆环结构作为超表面天线结构，结合不同材料膜层，实现了中红外波段2-6 μm范围内的多峰可调超表面吸收体，GST膜层从非晶态到晶态的相变可以进一步调控超表面吸收峰的可控偏移。同时，制备圆环结构所采用的单脉冲辐照加工方式，其加工效率可以通过激光脉冲分离方式得到极大提升，以保证大面积超表面吸收体器件的高效、低成本制备。

最后，通过引入线光源扫描加工进一步提高可加工面积和效率，同时基于超快激光激发材料表面等离激元波和激光诱导GST热相变机制，实现在GST表面大面积短程无序的激光诱导周期性表面结构的快速制备。由于对称性破缺，利用这种短程无序的亚波长超光栅获得了偏振不敏感吸收的特征。结合进一步界面匹配层设计，构建的超光栅可以实现在可见近红外波段400-1100 nm的宽谱高吸收。

本论文主要研究内容为基于相变材料在激光辐照下的相变及烧蚀特性，提出了具有超衍射极限纳米结构特征的大面积超表面吸收体的高效、低成本加工方法。本论文中所设计的相变材料超表面吸收体结构和功能各具特色，结构上包括圆环状和光栅状纳米结构，功能上有多峰吸收和宽带吸收，光谱范围分别为中红外波段2-6 μm和可见近红外波段400-1100 nm，所提出的制造方法能够实现高效的大面积纳米加工，在太阳能吸收、传感等相关领域具有广阔的发展潜力。此外，本论文中的相关结构与结果有希望拓展到其它波段乃至其它功能超表面的设计、制备与应用研究中，也为相关研究提供借鉴。

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