非球面红外透镜的超声辅助直线刃超精密切削技术研究

红外探测技术能在任何环境下提供可靠、准确的实时检测，尤其在夜间和恶劣天气下比毫米波、激光雷达等更具有优势。其中中远场红外探测器是自动驾驶、无人机、机器人实现全天候服役的核心部件，其推广应用的关键是非球面红外镜的高精度低成本制造。然而目前常用的高精度非球面加工工艺为传统的铣磨和研磨抛光，其加工效率低，加工同一批次产品稳定性也难以控制。超精密切削加工技术具有加工效率高，工艺流程简单，产品一致性远优于传统的加工方式，然而加工过程中金刚石刀具磨损限制了这项技术的广泛应用。因此，面对上述问题，亟需研究一种适合于超精密切削的新的加工方法和加工设备，以探求一种适用于红外光学非球面镜的高精度、低损耗、大批量生产的加工工艺方案。

本课题以红外多晶CVD硒化锌凸非球面为研究对象，以直线刃刀具代替传统的圆弧刃刀具，提出了直线刃滑移的新的加工方法，并在超精密切削中沿直线刃切削刃方向施加了一维超声振动，以实现红外领域内光学非球面镜片低损伤、高效的超精密加工，主要进行了以下工作：

首先，依据超声辅助直线刃切削凸非球面的加工原理，在现有超精密机床上搭建了切削加工实验平台和超声切削装置，并探究了新的加工方法下的刀具路径规划算法，最终在铜上进行了非球面预实验验证了新的加工工艺获得的表面质量更好。

在上述加工方法和实验装置研究的基础上，建立了直线刃和圆弧刃切削非球面的理论模型，研究了不同前角，进给速度，加工工艺下超精密切削硒化锌的加工性能和表面质量，系统地对表面形貌，切屑，切削力及加工中的相变和刀具磨损进行了分析，采用新的工艺加工的硒化锌PV值在0.12 μm左右，表面粗糙度Ra仅有1.2 nm。

最终在大进给速度下在直线刃滑移切削方法上施加一维超声振动，探究了有无超声下加工后工件的表面质量和刀具磨损。结果表明，施加超声振动能够在大进给速度下保证表面质量的同时降低刀具磨损。

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