南方科技大学知识苑(SUSTech KC): 光子数可分辨超导铝动态电感探测器的制备与研究

题名	光子数可分辨超导铝动态电感探测器的制备与研究
其他题名	Research of the Photon-number-resolving Superconducting Aluminum Microwave Kinetic Inductance Detector
姓名	王浩宇
姓名拼音	WANG Haoyu
学号	12132852
学位类型	硕士
学位专业	0856 材料与化工
学科门类/专业学位类别	08 工学
导师	邓可
导师单位	量子科学与工程研究院
论文答辩日期	2023-05-21
论文提交日期	2023-06-27
学位授予单位	南方科技大学
学位授予地点	深圳
摘要	在弱光探测领域中，超导探测器发挥着重要的作用。微波动态电感探测器 (MKID) 是现阶段主流的超导探测器之一。其工作原理是光子入射到超导体后破坏库伯对，影响超导体的动态电感，最终引起电路谐振频率的偏移。金属铝作为经典的 BCS 超导体之一，拥有工艺成熟、计算简便、成本低廉的优势。对于高性能铝制 MKID 结构和工艺的系统性研究有着重要意义。本文将从MKID 工作原理的介绍出发，设计了一组 MKID 电路，使用三端子技术和电路结构分解的仿真方式，建立了数学模型来优化仿真流程。仿真好的电路绘制版图制成掩模版，利用微纳加工平台制备了不同结构和加工工艺的 MKID 样品，研究了超导金属铝材料和氮化硅材料的生长工艺。样品于低温测试平台测试样品噪声、谐振频率、品质因数、光响应等。结果表明一种带有双层氮化硅材料的介质层结构的样品噪声最小。同时我们推导出电容电感的结构与噪声和非线性功率之间的关系。在光响应测试实验中，仅有1μm线宽电感存在着光响应。根据实验结果，在特定的噪声条件下，我们探究了MKID 电感部分长度、准粒子扩散现象以及准粒子重组时间等因素对MKID 响应的影响，给出了光子数可分辨的判决条件，综合计算出在低噪声制作工艺下铝MKID 的结构设计参考范围。本实验中基于低噪声工艺的30nm厚铝膜1μm线宽3000μm线长电感的样品实现了光子数可分辨，能量分辨率达到了0.263eV。
其他摘要	Superconducting detectors play an important role in the field of weak-light detection. Microwave kinetic inductance detector (MKID) is one of the mainstream superconducting detectors. Its working principle is that the photon is incident on the superconductor and then breaks the Cooper pair, which affects the kinetic inductance of the superconductor, and finally causes the shift of the resonance frequency. As one of the BCS superconductors, Aluminum has the advantages of mature process, calculation simplicity, and low cost. The systematic research on the structure and process of high-performance aluminum MKID is of great significance. This article started with the introduction of MKID working principle. We designed a group of MKID circuits and then used the three-ports technology and the simulation method of circuit structure decomposition to optimize the simulation process. The simulated circuit layout was drawn and made into a mask. Then we used the micro-nano processing platform to prepare MKID samples with different structures and processes. And we studied the process of superconducting aluminum and silicon nitride materials. The noise, resonant frequency, quality factor, and optical response of the samples were tested on the low-temperature testing platform. The measurement results showed that the sample with a double-layer silicon nitride dielectric layer structure has the lowest noise. At the same time, we derive the relationship between the structure of capacitance and inductance and the noise and internal power. In the experience of optical response, only 1μm width inductor sample had optical response. According to the experimental results, we explored the influences of MKID inductor length, quasiparticle diffusion phenomenon, and quasiparticle recombination time on the response of MKID under specific noise conditions. Then we give the photon number resolving judgment condition and calculated the reference range of aluminum MKID structure under low noise manufacturing process. In this experiment, the sample of 30nm thick aluminum film with 1μm width and 3000μm length inductor based on low noise process realized photon number resolving and the energy resolution reached 0.263eV.
关键词	MKID 动态电感频率响应准粒子扩散单光子可分辨
其他关键词	MKID Kinetic Inductance Frequency Response Quasiparticle Diffusion Photon Number Resolving
语种	中文
培养类别	独立培养
入学年份	2021
学位授予年份	2023-06
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所在学位评定分委会	材料与化工
国内图书分类号	O511+.9
来源库	人工提交
成果类型	学位论文
条目标识符	http://sustech.caswiz.com/handle/2SGJ60CL/544080
专题	量子科学与工程研究院
推荐引用方式 GB/T 7714	王浩宇. 光子数可分辨超导铝动态电感探测器的制备与研究[D]. 深圳. 南方科技大学,2023.

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