Structural evolution and thermoelectric properties of Mg3SbxBi2-x thin films deposited by magnetron sputtering

Sadowski, Grzegorz1,2; Shu, Rui2; le Febvrier, Arnaud2; Han, Zhijia3; Music, Denis1,4; Liu, Weishu3,5; Eklund, Per2

2023-07-01

10.1116/6.0002635

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A   影响因子和分区

0734-2101

1520-8559

Mg3Bi2-based compounds are of great interest for thermoelectric applications near room temperature. Here, undoped p-type Mg3SbxBi2-x thin films were synthesized using magnetron sputtering (three elemental targets in Ar atmosphere) with a growth temperature of 200 ? on three different substrates, namely, Si as well as c- and r-sapphire. The elemental composition was measured with energy-dispersive x-ray spectroscopy and the structure by x-ray diffraction. The electrical resistivity and the Seebeck coefficient were determined under He atmosphere from room temperature to the growth temperature. All samples are crystalline exhibiting the La2O3-type crystal structure (space group P-3m1). The observed thermoelectric response is consistent with a semiconductive behavior. With increasing x, the samples become more electrically resistive due to the increasing bandgap. High Bi content (x < 1) is thus beneficial due to lower resistivity and a higher power factor near room temperature. Thermoelectric thin films synthesized at low temperatures may provide novel pathways to enable flexible devices on polymeric and other heat-sensitive substrates.

SCI ; EI

英语

其他

Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University[2009 00971] ; Knut and Alice Wallenberg Foundation through the Wallenberg Academy Fellows Program[KAW-2020.0196] ; Swedish Research Council (VR)["2016-03365","2021-03826"] ; Olle Engkvist Foundation[217-0023] ; National Key Research and Development Program of China[2018YFB0703600] ; National Natural Science Foundation of China (NNSFC)[51872133] ; Guangdong Innovative and Entrepreneurial Research Team Program[2016ZT06G587] ; Guangdong Provincial Key Laboratory Program from the Department of Science and Technology of Guangdong Province[2021B1212040001]

Materials Science ; Physics

Materials Science, Coatings & Films ; Physics, Applied

WOS:001007849300001

A V S AMER INST PHYSICS

20232614309653

Antimony compounds ; Atmospheric temperature ; Bismuth compounds ; Crystal structure ; Energy dispersive spectroscopy ; Growth temperature ; Magnesium compounds ; Magnetron sputtering ; Sapphire

Atmospheric Properties:443.1 ; Gems:482.2.1 ; Crystal Lattice:933.1.1

MATERIALS SCIENCE

Web of Science

1.Malmo Univ, Dept Mat Sci & Appl Math, SE-20506 Malmo, Sweden
2.Linkoping Univ, Thin Film Phys Div, Dept Phys Chem & Biol IFM, SE-58183 Linkoping, Sweden
3.Southern Univ Sci & Technol, Dept Mat Sci & Engn, Shenzhen 518055, Guangdong, Peoples R China
4.Malmo Univ, Biofilms Res Ctr Biointerfaces, SE-20506 Malmo, Sweden
5.Southern Univ Sci & Technol, Guangdong Prov Key Lab Funct Oxide Mat & Devices, Shenzhen 518055, Guangdong, Peoples R China

Sadowski, Grzegorz,Shu, Rui,le Febvrier, Arnaud,et al. Structural evolution and thermoelectric properties of Mg3SbxBi2-x thin films deposited by magnetron sputtering[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2023,41(4).

Sadowski, Grzegorz.,Shu, Rui.,le Febvrier, Arnaud.,Han, Zhijia.,Music, Denis.,...&Eklund, Per.(2023).Structural evolution and thermoelectric properties of Mg3SbxBi2-x thin films deposited by magnetron sputtering.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,41(4).

Sadowski, Grzegorz,et al."Structural evolution and thermoelectric properties of Mg3SbxBi2-x thin films deposited by magnetron sputtering".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 41.4(2023).