题名 | Removal of silicon-containing contaminants from TEM specimens |
作者 | |
通讯作者 | He, Dong Sheng |
发表日期 | 2023-11-01
|
DOI | |
发表期刊 | |
ISSN | 0304-3991
|
EISSN | 1879-2723
|
卷号 | 253 |
摘要 | Contaminant-free specimens are an essential prerequisite for high-quality electron microscopy. Silicon is the second most abundant element in the earth's crust with similar chemical properties to that of carbon. However, as a potential source of contamination, silicon has been occasionally reported but not specifically addressed in the electron microscopy community to date. This work highlights the widespread presence of silicon-containing contaminants on TEM specimens, and proposes a general solution for this type of contaminants by using SF6 as a silicon remover. After the treatment, both hydrocarbons and silicon-containing contaminants were removed and no further electron beam showering was needed for most of the specimens to achieve time-invariant imaging. It is expected that this method could be beneficial not only for electron microscopes but also for other surfacesensitive analytical instruments. |
关键词 | |
相关链接 | [来源记录] |
收录类别 | |
语种 | 英语
|
学校署名 | 第一
; 通讯
|
资助项目 | Science and Technology Innovation Com- mittee Foundation of Shenzhen[JCYJ20190809142019365]
|
WOS研究方向 | Microscopy
|
WOS类目 | Microscopy
|
WOS记录号 | WOS:001060308200001
|
出版者 | |
EI入藏号 | 20232814382349
|
EI主题词 | Carbon
; Contamination
; Electron microscopes
; Electrons
; Failure analysis
; Hydrocarbons
; Structural geology
|
EI分类号 | Geology:481.1
; Nonferrous Metals and Alloys excluding Alkali and Alkaline Earth Metals:549.3
; Chemical Products Generally:804
; Organic Compounds:804.1
|
ESI学科分类 | CHEMISTRY
|
来源库 | Web of Science
|
引用统计 |
被引频次[WOS]:5
|
成果类型 | 期刊论文 |
条目标识符 | http://sustech.caswiz.com/handle/2SGJ60CL/559331 |
专题 | 公共分析测试中心 |
作者单位 | Southern Univ Sci & Technol, Core Res Facil, 1088, XueYuan Rd, Shenzhen 518055, Guangdong, Peoples R China |
第一作者单位 | 公共分析测试中心 |
通讯作者单位 | 公共分析测试中心 |
第一作者的第一单位 | 公共分析测试中心 |
推荐引用方式 GB/T 7714 |
He, Dong Sheng. Removal of silicon-containing contaminants from TEM specimens[J]. ULTRAMICROSCOPY,2023,253.
|
APA |
He, Dong Sheng.(2023).Removal of silicon-containing contaminants from TEM specimens.ULTRAMICROSCOPY,253.
|
MLA |
He, Dong Sheng."Removal of silicon-containing contaminants from TEM specimens".ULTRAMICROSCOPY 253(2023).
|
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