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题名

Removal of silicon-containing contaminants from TEM specimens

作者
通讯作者He, Dong Sheng
发表日期
2023-11-01
DOI
发表期刊
ISSN
0304-3991
EISSN
1879-2723
卷号253
摘要
Contaminant-free specimens are an essential prerequisite for high-quality electron microscopy. Silicon is the second most abundant element in the earth's crust with similar chemical properties to that of carbon. However, as a potential source of contamination, silicon has been occasionally reported but not specifically addressed in the electron microscopy community to date. This work highlights the widespread presence of silicon-containing contaminants on TEM specimens, and proposes a general solution for this type of contaminants by using SF6 as a silicon remover. After the treatment, both hydrocarbons and silicon-containing contaminants were removed and no further electron beam showering was needed for most of the specimens to achieve time-invariant imaging. It is expected that this method could be beneficial not only for electron microscopes but also for other surfacesensitive analytical instruments.
关键词
相关链接[来源记录]
收录类别
SCI ; EI
语种
英语
学校署名
第一 ; 通讯
资助项目
Science and Technology Innovation Com- mittee Foundation of Shenzhen[JCYJ20190809142019365]
WOS研究方向
Microscopy
WOS类目
Microscopy
WOS记录号
WOS:001060308200001
出版者
EI入藏号
20232814382349
EI主题词
Carbon ; Contamination ; Electron microscopes ; Electrons ; Failure analysis ; Hydrocarbons ; Structural geology
EI分类号
Geology:481.1 ; Nonferrous Metals and Alloys excluding Alkali and Alkaline Earth Metals:549.3 ; Chemical Products Generally:804 ; Organic Compounds:804.1
ESI学科分类
CHEMISTRY
来源库
Web of Science
引用统计
被引频次[WOS]:5
成果类型期刊论文
条目标识符http://sustech.caswiz.com/handle/2SGJ60CL/559331
专题公共分析测试中心
作者单位
Southern Univ Sci & Technol, Core Res Facil, 1088, XueYuan Rd, Shenzhen 518055, Guangdong, Peoples R China
第一作者单位公共分析测试中心
通讯作者单位公共分析测试中心
第一作者的第一单位公共分析测试中心
推荐引用方式
GB/T 7714
He, Dong Sheng. Removal of silicon-containing contaminants from TEM specimens[J]. ULTRAMICROSCOPY,2023,253.
APA
He, Dong Sheng.(2023).Removal of silicon-containing contaminants from TEM specimens.ULTRAMICROSCOPY,253.
MLA
He, Dong Sheng."Removal of silicon-containing contaminants from TEM specimens".ULTRAMICROSCOPY 253(2023).
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