Periodic nanostructures on single-crystal copper for SERS substrate fabricated by using AFM dynamic lithography

He，Yang1,2,3; Wang，Jiqiang4,5; Yan，Yongda4,5; Geng，Yanquan4,5

2023-12-01

10.1016/j.vacuum.2023.112595

Vacuum   影响因子和分区

0042-207X

1879-2715

The fabrication of periodic nanostructures on noble metals as surface enhanced Raman scattering (SERS) substrate is still challenging through facile and cost-effective process. Dynamic lithography under AFM tapping mode has been applied to the fabrication of nanogrooves on single-crystal copper to reduce the feature size. However, there was a lack of fundamental understanding of the effect of the fabrication of periodic nanostructures due to dynamic lithography and then SERS enhancement. To this end, this study aims to investigate the variation of the energy dissipation and the corresponding fabricated nanogrooves at different laser spot positions. It was found that improper laser position was contributed to the increased energy dissipation and irregular nanogrooves were thus obtained with much larger machined depth. On the contrary, at the optimal laser position, the minimal sensitivity was associated with the maximum voltage value on the photodiode. In this case, regular nanogrooves with controlled feature size can be produced for the fabrication of periodic nanostructures. And checkerboard nanodots with a period of 200 nm were fabricated by the combination of arrays of nanogrooves, which indicated advantages of high stability for AFM dynamic lithography. In addition, rhodamine 6G (R6G) was selected as the detecting target to measure SERS spectra of fabricated substrates. Results indicated the Raman enhancement factors can be promoted due to uniform shape of nanogroove and high resolution in horizon dimension.

Dynamic lithography Periodic nanostructures SERS substrate Single-crystal copper

SCI ; EI

英语

第一

National Natural Science Foundation of China[52035004];National Natural Science Foundation of China[52222512];National Natural Science Foundation of China[52293401];China Association for Science and Technology[YESS20200155];Natural Science Foundation of Heilongjiang Province[YQ2020E015];

Materials Science ; Physics

Materials Science, Multidisciplinary ; Physics, Applied

WOS:001080913300001

PERGAMON-ELSEVIER SCIENCE LTD

20233714725369

Copper ; Cost effectiveness ; Energy dissipation ; Lithography ; Nanostructures ; Raman scattering ; Raman spectroscopy ; Single crystals ; Substrates ; Surface scattering

Energy Losses (industrial and residential):525.4 ; Copper:544.1 ; Light/Optics:741.1 ; Nanotechnology:761 ; Industrial Economics:911.2 ; Classical Physics; Quantum Theory; Relativity:931 ; Solid State Physics:933 ; Crystalline Solids:933.1

MATERIALS SCIENCE

2-s2.0-85170643702

Scopus

1.Shenzhen Key Laboratory of Cross-scale Manufacturing Mechanics,Southern University of Science and Technology,Shenzhen,518055,China
2.SUSTech Institute for Manufacturing Innovation,Southern University of Science and Technology,Shenzhen,518055,China
3.Department of Mechanics and Aerospace Engineering,Southern University of Science and Technology,Shenzhen,518055,China
4.The State Key Laboratory of Robotics and Systems,Robotics Institute,Harbin Institute of Technology,Harbin,150001,China
5.Center for Precision Engineering,Harbin Institute of Technology,Harbin,150001,China

He，Yang,Wang，Jiqiang,Yan，Yongda,et al. Periodic nanostructures on single-crystal copper for SERS substrate fabricated by using AFM dynamic lithography[J]. Vacuum,2023,218.

He，Yang,Wang，Jiqiang,Yan，Yongda,&Geng，Yanquan.(2023).Periodic nanostructures on single-crystal copper for SERS substrate fabricated by using AFM dynamic lithography.Vacuum,218.

He，Yang,et al."Periodic nanostructures on single-crystal copper for SERS substrate fabricated by using AFM dynamic lithography".Vacuum 218(2023).