Long-infrared dual-wavelength linear-polarization-multiplexed confocal metalens based on an all-silicon dielectric

Xu，Ping1; Li，Xiongchao1; Yang，Tuo1; Xiao，Yufei1; Cheng，Xin2; Lou，Fei3; Zhang，Xuanming2; Huang，Haixuan4; Zhang，Xulin1; Wang，Mengyu1; Xu，Haidong1; Yuan，Xia1

2023-07-31

10.1364/OE.494599

Optics Express   影响因子和分区

1094-4087

1094-4087

The metalens has vast applications in biomedicine and industrial manufacturing due to their ultrathin structure and vital ability to manipulate the properties of light waves for long-infrared systems. However, it is difficult for metalens to achieve the confocal function with high focusing efficiency, wide wavelength bandwidth, and low structural complexity. Here, we propose and experimentally demonstrate an all-silicon dielectric metalens composed of arrays of minimalist meta-atoms with a single rectangular nanopillar arranged on a periodic square lattice substrate, which realizes the confocal function of the orthogonal-linear-polarized light with wavelengths of 10.6 µm and 9.3 µm, with focusing efficiencies of 64.94% and 60.03%, respectively. Also, it reveals nearly the diffraction-limited focusing performance. In addition, the metalens can realize precise long-infrared thermal imaging. Moreover, the proposed metalens is compatible with the standard complementary metal oxide semiconductor processes, which can effectively reduce the manufacturing cost and provide a feasible solution for developing planar integrated multifunctional micro-nanophotonic devices in the long-infrared field.

SCI ; EI

英语

其他

National Natural Science Foundation of China[61275167];

Optics

Optics

WOS:001050794700003

Optica Publishing Group

20233514636937

CMOS integrated circuits ; Focusing ; Infrared imaging ; MOS devices ; Oxide semiconductors ; Silicon

Nonferrous Metals and Alloys excluding Alkali and Alkaline Earth Metals:549.3 ; Semiconducting Materials:712.1 ; Semiconductor Devices and Integrated Circuits:714.2 ; Imaging Techniques:746 ; Production Engineering:913.1

PHYSICS

2-s2.0-85168760425

Scopus

1.State Key Laboratory of Radio Frequency Heterogeneous Integration,Shenzhen University,Shenzhen,518060,China
2.Department of Materials Science and Engineering,Southern University of Science and Technology (SUSTech),Shenzhen,518055,China
3.Shenzhen Replicarve Co.,Ltd,Shenzhen,518055,China
4.College of Big Data and Internet,Shenzhen Technology University,Shenzhen,518118,China

Xu，Ping,Li，Xiongchao,Yang，Tuo,et al. Long-infrared dual-wavelength linear-polarization-multiplexed confocal metalens based on an all-silicon dielectric[J]. Optics Express,2023,31(16):26685-26696.

Xu，Ping.,Li，Xiongchao.,Yang，Tuo.,Xiao，Yufei.,Cheng，Xin.,...&Yuan，Xia.(2023).Long-infrared dual-wavelength linear-polarization-multiplexed confocal metalens based on an all-silicon dielectric.Optics Express,31(16),26685-26696.

Xu，Ping,et al."Long-infrared dual-wavelength linear-polarization-multiplexed confocal metalens based on an all-silicon dielectric".Optics Express 31.16(2023):26685-26696.