Microwave dielectric characterization and densification mechanism analysis of CaO-B2O3-SiO2 glass–ceramic/Al2O3 composites for LTCC applications

Xiong，Zilong1; Xue，Wenzhuo1; Li，Mujun1; Tan，Feihu1,2; Chen，Yupeng1,2; Yu，Hongyu1,2,3

2023

10.1111/jace.19436

Journal of the American Ceramic Society   影响因子和分区

0002-7820

1551-2916

In this study, nine component points were designed based on a CaO-BO-SiO (CBS) glass system with a high boron content, and CBS glass/AlO composites were developed for low-temperature co-fired ceramic (LTCC) applications. Furthermore, the densification process, phase compositions, microstructures, and properties were investigated. The results indicated that the softening of glass and interfacial reaction between the glass and AlO were the two most important factors affecting LTCC's densification process. The real-time shrinkage rate of LTCC during sintering was simulated using the thermal shrinkage curve and combined with DTA and X-ray diffraction. It was proven that the formation of the CaAl(BO)O phase contributed to the reduction in glass viscosity and promoted the formation of a dense structure. The LTCC composite with 30 vol% glass sintered at 850°C exhibited a coefficient of thermal expansion of 4.55–6.35 ppm/◦C, ε of 3.5–5.0, and a minimum tan δ of 0.0018 at 15 GHz. Therefore, these properties make the CBS–LTCC more suitable for high-frequency applications.

Densification mechanism Dielectric properties LTCC

SCI ; EI

英语

第一 ; 通讯

Shenzhen Municipal Council of Science and Innovation["JCYJ20200109141233476","JCYJ20210324120409025","HZQB-KCZYZ-2021052"] ; Shccig-Qinling Program and Sustech-sci Joint Laboratory[LHSYS0323001]

Materials Science

Materials Science, Ceramics

WOS:001063722300001

WILEY

MATERIALS SCIENCE

2-s2.0-85170235628

Scopus

1.School of Microelectronics,South University of Science and Technology,Shenzhen,China
2.Engineering Research Center of Integrated Circuits for Next-Generation Communications,Ministry of Education,Southern University of Science and Technology,Shenzhen,China
3.GaN Device Engineering Technology Research Center of Guangdong,Southern University of Science and Technology,Shenzhen,China

Xiong，Zilong,Xue，Wenzhuo,Li，Mujun,等. Microwave dielectric characterization and densification mechanism analysis of CaO-B2O3-SiO2 glass–ceramic/Al2O3 composites for LTCC applications[J]. Journal of the American Ceramic Society,2023,107(1):234-243.

Xiong，Zilong,Xue，Wenzhuo,Li，Mujun,Tan，Feihu,Chen，Yupeng,&Yu，Hongyu.(2023).Microwave dielectric characterization and densification mechanism analysis of CaO-B2O3-SiO2 glass–ceramic/Al2O3 composites for LTCC applications.Journal of the American Ceramic Society,107(1),234-243.

Xiong，Zilong,et al."Microwave dielectric characterization and densification mechanism analysis of CaO-B2O3-SiO2 glass–ceramic/Al2O3 composites for LTCC applications".Journal of the American Ceramic Society 107.1(2023):234-243.