Rapid Fabrication of High-Performance Flexible Pressure Sensors Using Laser Pyrolysis Direct Writing

Wang，Shaogang1,2; Zong，Qihang2; Yang，Huiru2; Tan，Chunjian1,2; Huang，Qianming2; Liu，Xu1,2; Zhang，Guoqi1; French，Paddy1; Ye，Huaiyu1,2

2023

10.1021/acsami.3c04290

ACS Applied Materials and Interfaces   影响因子和分区

1944-8244

1944-8252

The fabrication of flexible pressure sensors with low cost, high scalability, and easy fabrication is an essential driving force in developing flexible electronics, especially for high-performance sensors that require precise surface microstructures. However, optimizing complex fabrication processes and expensive microfabrication methods remains a significant challenge. In this study, we introduce a laser pyrolysis direct writing technology that enables rapid and efficient fabrication of high-performance flexible pressure sensors with a micro-truncated pyramid array. The pressure sensor demonstrates exceptional sensitivities, with the values of 3132.0, 322.5, and 27.8 kPa in the pressure ranges of 0-0.5, 0.5-3.5, and 3.5-10 kPa, respectively. Furthermore, the sensor exhibits rapid response times (loading: 22 ms, unloading: 18 ms) and exceptional reliability, enduring over 3000 pressure loading and unloading cycles. Moreover, the pressure sensor can be easily integrated into a sensor array for spatial pressure distribution detection. The laser pyrolysis direct writing technology introduced in this study presents a highly efficient and promising approach to designing and fabricating high-performance flexible pressure sensors utilizing micro-structured polymer substrates.

continuous laser pyrolysis flexible pressure sensor laser direct writing micro-truncated pyramid PDMS UV laser

SCI ; EI

英语

通讯

National Key Ramp;D Program of China[2018YFE0204600] ; Shenzhen Fundamental Research Program[JCYJ20200109140822796] ; Special Funds for the Cultivation of Guandong College Students' Scientific and Technological Innovation[pdjh 2022c0080]

Science & Technology - Other Topics ; Materials Science

Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary

WOS:001038332400001

AMER CHEMICAL SOC

20233314568953

Fabrication ; Flexible electronics ; Microstructure ; Pyrolysis ; Unloading

Materials Handling Methods:691.2 ; Electronic Equipment, General Purpose and Industrial:715 ; Chemical Reactions:802.2 ; Pressure Measuring Instruments:944.3 ; Materials Science:951

2-s2.0-85167841375

Scopus

1.Faculty of EEMCS,Delft University of Technology,Delft,Mekelweg 4,2628 CD,Netherlands
2.School of Microelectronics,Southern University of Science and Technology,Shenzhen,518055,China

Wang，Shaogang,Zong，Qihang,Yang，Huiru,et al. Rapid Fabrication of High-Performance Flexible Pressure Sensors Using Laser Pyrolysis Direct Writing[J]. ACS Applied Materials and Interfaces,2023,15:41055-41066.

Wang，Shaogang.,Zong，Qihang.,Yang，Huiru.,Tan，Chunjian.,Huang，Qianming.,...&Ye，Huaiyu.(2023).Rapid Fabrication of High-Performance Flexible Pressure Sensors Using Laser Pyrolysis Direct Writing.ACS Applied Materials and Interfaces,15,41055-41066.

Wang，Shaogang,et al."Rapid Fabrication of High-Performance Flexible Pressure Sensors Using Laser Pyrolysis Direct Writing".ACS Applied Materials and Interfaces 15(2023):41055-41066.