南方科技大学知识苑(SUSTech KC): High-Resolution Optical Three-Axis Tactile Microsensor Based on III-Nitride Devices with Integrated PDMS Bumps

题名	High-Resolution Optical Three-Axis Tactile Microsensor Based on III-Nitride Devices with Integrated PDMS Bumps
作者	Jiahao Yin1 ; Yumeng Luo1 ; Liang Chen 2; Qing Wang1 ; Hongyu Yu1 ; Kwai Hei Li1
通讯作者	Kwai Hei Li
发表日期	2023
DOI	10.1109/LED.2023.3325467
发表期刊	IEEE Electron Device Letters 影响因子和分区
ISSN	1558-0563
卷号	PP 期号:99页码:1-1
关键词	GaN Tactile Sensor Optical Sensor Integrated Optical Device
相关链接	[IEEE记录]
收录类别	SCI ; EI
语种	英语
学校署名	第一 ; 通讯
EI入藏号	20234314972895
EI主题词	Gallium nitride ; III-V semiconductors ; Light emitting diodes ; Manganese ; Microsensors
EI分类号	Manganese and Alloys:543.2 ; Semiconducting Materials:712.1 ; Semiconductor Devices and Integrated Circuits:714.2 ; Optical Devices and Systems:741.3
ESI学科分类	ENGINEERING
来源库	IEEE
全文链接	https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10287376
引用统计	被引频次[WOS]：1
成果类型	期刊论文
条目标识符	http://sustech.caswiz.com/handle/2SGJ60CL/582731
专题	工学院_深港微电子学院
作者单位	1.School of Microelectronics, Southern University of Science and Technology, Shenzhen, China 2.Foshan Electrical and Lighting Company, Ltd, Foshan, China
第一作者单位	深港微电子学院
通讯作者单位	深港微电子学院
第一作者的第一单位	深港微电子学院
推荐引用方式 GB/T 7714	Jiahao Yin,Yumeng Luo,Liang Chen,et al. High-Resolution Optical Three-Axis Tactile Microsensor Based on III-Nitride Devices with Integrated PDMS Bumps[J]. IEEE Electron Device Letters,2023,PP(99):1-1.
APA	Jiahao Yin,Yumeng Luo,Liang Chen,Qing Wang,Hongyu Yu,&Kwai Hei Li.(2023).High-Resolution Optical Three-Axis Tactile Microsensor Based on III-Nitride Devices with Integrated PDMS Bumps.IEEE Electron Device Letters,PP(99),1-1.
MLA	Jiahao Yin,et al."High-Resolution Optical Three-Axis Tactile Microsensor Based on III-Nitride Devices with Integrated PDMS Bumps".IEEE Electron Device Letters PP.99(2023):1-1.