题名 | PDMS-assisted GaN optical hardness sensors |
作者 | |
通讯作者 | Kwai Hei,Li |
发表日期 | 2023-10-23
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DOI | |
发表期刊 | |
ISSN | 0146-9592
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EISSN | 1539-4794
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卷号 | 48期号:21页码:5631-5634 |
摘要 | In this Letter, an optical hardness sensor is fabricated based on a GaN-based device combined with finger-shaped PDMS. The chip-scale 1 mm × 1 mm GaN-based device is monolithically integrated with a light emitter and receiver responsible for light emission and photodetection, respectively. The micropatterned PDMS layer can effectively convert the hardness information of the measured object into an optical change detected by the receiver. Verified by experiment measurements, the sensor exhibits a linear response in a hardness range of 1–84 HA, a sensitivity of 0.24 µA/HA, a fast response time of 1.2 ms, and a high degree of repeatability and stability. The optical sensor has the characteristics of tiny size, high compactness, inexpensive fabrication cost, wide measurement range, and high stability, making it suitable for hardness measurement in practical applications.
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相关链接 | [来源记录] |
收录类别 | |
语种 | 英语
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学校署名 | 通讯
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资助项目 | Shenzhen Fundamental Research Program[JCYJ2022053011 3201003]
; National Natural Science Foundation of China["12074170","62004088","62204159"]
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WOS研究方向 | Optics
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WOS类目 | Optics
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WOS记录号 | WOS:001116528500004
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出版者 | |
EI入藏号 | 20234515021745
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EI主题词 | Gallium nitride
; III-V semiconductors
; Light emission
; Microchannels
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EI分类号 | Semiconducting Materials:712.1
; Light/Optics:741.1
; Materials Science:951
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ESI学科分类 | PHYSICS
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来源库 | 人工提交
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引用统计 |
被引频次[WOS]:1
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成果类型 | 期刊论文 |
条目标识符 | http://sustech.caswiz.com/handle/2SGJ60CL/610144 |
专题 | 工学院_深港微电子学院 |
作者单位 | 1.College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China 2.School of Microelectronics, Southern University of Science and Technology, Shenzhen 518055, China |
通讯作者单位 | 深港微电子学院 |
推荐引用方式 GB/T 7714 |
Ling,Zhu,ZhiLiang,He,Jianhao,Zhan,et al. PDMS-assisted GaN optical hardness sensors[J]. Optics Letters,2023,48(21):5631-5634.
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APA |
Ling,Zhu,ZhiLiang,He,Jianhao,Zhan,Jian,Chen,&Kwai Hei,Li.(2023).PDMS-assisted GaN optical hardness sensors.Optics Letters,48(21),5631-5634.
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MLA |
Ling,Zhu,et al."PDMS-assisted GaN optical hardness sensors".Optics Letters 48.21(2023):5631-5634.
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条目包含的文件 | 条目无相关文件。 |
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