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题名

PDMS-assisted GaN optical hardness sensors

作者
通讯作者Kwai Hei,Li
发表日期
2023-10-23
DOI
发表期刊
ISSN
0146-9592
EISSN
1539-4794
卷号48期号:21页码:5631-5634
摘要

In this Letter, an optical hardness sensor is fabricated based on a GaN-based device combined with finger-shaped PDMS. The chip-scale 1 mm × 1 mm GaN-based device is monolithically integrated with a light emitter and receiver responsible for light emission and photodetection, respectively. The micropatterned PDMS layer can effectively convert the hardness information of the measured object into an optical change detected by the receiver. Verified by experiment measurements, the sensor exhibits a linear response in a hardness range of 1–84 HA, a sensitivity of 0.24 µA/HA, a fast response time of 1.2 ms, and a high degree of repeatability and stability. The optical sensor has the characteristics of tiny size, high compactness, inexpensive fabrication cost, wide measurement range, and high stability, making it suitable for hardness measurement in practical applications.

 

相关链接[来源记录]
收录类别
SCI ; EI
语种
英语
学校署名
通讯
资助项目
Shenzhen Fundamental Research Program[JCYJ2022053011 3201003] ; National Natural Science Foundation of China["12074170","62004088","62204159"]
WOS研究方向
Optics
WOS类目
Optics
WOS记录号
WOS:001116528500004
出版者
EI入藏号
20234515021745
EI主题词
Gallium nitride ; III-V semiconductors ; Light emission ; Microchannels
EI分类号
Semiconducting Materials:712.1 ; Light/Optics:741.1 ; Materials Science:951
ESI学科分类
PHYSICS
来源库
人工提交
引用统计
被引频次[WOS]:1
成果类型期刊论文
条目标识符http://sustech.caswiz.com/handle/2SGJ60CL/610144
专题工学院_深港微电子学院
作者单位
1.College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China
2.School of Microelectronics, Southern University of Science and Technology, Shenzhen 518055, China
通讯作者单位深港微电子学院
推荐引用方式
GB/T 7714
Ling,Zhu,ZhiLiang,He,Jianhao,Zhan,et al. PDMS-assisted GaN optical hardness sensors[J]. Optics Letters,2023,48(21):5631-5634.
APA
Ling,Zhu,ZhiLiang,He,Jianhao,Zhan,Jian,Chen,&Kwai Hei,Li.(2023).PDMS-assisted GaN optical hardness sensors.Optics Letters,48(21),5631-5634.
MLA
Ling,Zhu,et al."PDMS-assisted GaN optical hardness sensors".Optics Letters 48.21(2023):5631-5634.
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