Study of Cu Content Reference Materials Used in AlCu Films for X-ray Energy/Wavelength-Dispersive Spectrometer Calibration

Li, Xiao1; Zhang, Ran2,3; Tian, Donghui2; Cui, Lei4; Zhang, Yi5; Li, Xu2; Lai, Yuming1; Wang, Yalei4

2023-10-01

10.3390/coatings13101773

COATINGS   影响因子和分区

2079-6412

Calibration is one of the most important factors affecting the measurement accuracy of X-ray energy/wavelength-dispersive spectrometers (EDS/WDSs). In this work, three Cu content reference materials used in AlCu films for X-ray EDS/WDS calibration are prepared using magnetron sputtering deposition. The Cu content standard values of the three reference materials are determined using an inductively coupled plasma optical emission spectrometer (ICP-OES) and the uncertainties of the reference materials are evaluated. The results show that the homogeneity and stability of the three Cu content reference materials used in AlCu films meet the requirements. The Cu content standard values of the three reference materials are 2.56%, 14.64%, and 49.46% (mass fraction), respectively. Their extended uncertainties are 0.14%, 0.42%, and 0.98% (k = 2), respectively. Using quantitative analysis, it was determined that the three developed reference materials meet the calibration requirements of X-ray EDS/WDS, thus guaranteeing the accuracy and consistency of the measurement results.

EDS WDS Cu content reference material AlCu film

SCI

英语

其他

Fundamental Research Funds for the Central Universities[61904170] ; Youth Program of the National Natural Science Foundation of China[FRF-TP-22-018A1]

Materials Science ; Physics

Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied

WOS:001094182600001

MDPI

Web of Science

1.Univ Sci & Technol Beijing, Natl Ctr Mat Serv Safety, Beijing 100083, Peoples R China
2.Natl Inst Metrol, Ctr Adv Measurement Sci, Beijing 100029, Peoples R China
3.Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen 518055, Peoples R China
4.Nanjing Inst Measurement & Testing Technol, Nanjing 210049, Peoples R China
5.Henan Univ Sci & Technol, Sch Mat Sci & Engn, Luoyang 471023, Peoples R China

Li, Xiao,Zhang, Ran,Tian, Donghui,et al. Study of Cu Content Reference Materials Used in AlCu Films for X-ray Energy/Wavelength-Dispersive Spectrometer Calibration[J]. COATINGS,2023,13(10).

Li, Xiao.,Zhang, Ran.,Tian, Donghui.,Cui, Lei.,Zhang, Yi.,...&Wang, Yalei.(2023).Study of Cu Content Reference Materials Used in AlCu Films for X-ray Energy/Wavelength-Dispersive Spectrometer Calibration.COATINGS,13(10).

Li, Xiao,et al."Study of Cu Content Reference Materials Used in AlCu Films for X-ray Energy/Wavelength-Dispersive Spectrometer Calibration".COATINGS 13.10(2023).