Study of resistive switching behavior in HfO2 nanocrystals synthesized via a low temperature hydrothermal method

Xiaozhang,Chen1; Heng,Li1; Zhaobo,Tian1; Yuan,Zhu1,2; Longxing,Su1,3

2023-12-11

10.1088/1361-6528/ad143e

NANOTECHNOLOGY   影响因子和分区

0957-4484

1361-6528

The resistive switching property in HfO have attracted increasing interest in recent years. In this work, amorphous HfO nanocrystals are synthesized by a facile hydrothermal method. Then, the as-synthesized nanocrystals are rapid thermal annealed in different atmospheres for improving the crystal quality, and monoclinic phase is determined as the main crystal structure of the annealed HfO. Subsequently, metal-insulator-metal structure devices based on HfO samples are fabricated. Electrical measurement indicates that 700 °C annealing processes in Air and Ar environments can slightly improve the bipolar resistive switching and retention behaviors. Higher annealed temperature (900 °C) will further improve the crystal quality of HfO, while the resistive switching and retention behaviors of the devices continuously attenuate, which can be ascribed to the reduction of the conductive filaments induced by defects.

annealing crystal structure HfO2 nanocrystals resistive switching

SCI ; EI

英语

第一 ; 通讯

IOP Publishing

MATERIALS SCIENCE

2-s2.0-85181774968

人工提交

在线出版

1.School of Microelectronics, Southern University of Science and Technology, Shenzhen, 518055, China
2.Engineering Research Center of Integrated Circuits for Next-GenerationCommunications, Ministry of Education, Southern University of Science andTechnology, Shenzhen 518055, China
3.International School of Microelectronics, Dongguan University of Technology, Dongguan, 523808, China

Xiaozhang,Chen,Heng,Li,Zhaobo,Tian,et al. Study of resistive switching behavior in HfO2 nanocrystals synthesized via a low temperature hydrothermal method[J]. NANOTECHNOLOGY,2023,35(12).

Xiaozhang,Chen,Heng,Li,Zhaobo,Tian,Yuan,Zhu,&Longxing,Su.(2023).Study of resistive switching behavior in HfO2 nanocrystals synthesized via a low temperature hydrothermal method.NANOTECHNOLOGY,35(12).

Xiaozhang,Chen,et al."Study of resistive switching behavior in HfO2 nanocrystals synthesized via a low temperature hydrothermal method".NANOTECHNOLOGY 35.12(2023).