Tabletop ptychographic imaging system with a 515 nm laser driven high-order harmonic source

Li，Kui1,2; Lin，Huixiang3; Niu，Jin1,2; Xu，Hao1; Wang，Yutong1; Fan，Zhongwei2; Ke，Changjun1; Zhang，Xiaoshi1,4; Zhang，Fucai3; Li，Jie1,2

2024-05-01

10.1016/j.optlaseng.2024.108105

Optics and Lasers in Engineering   影响因子和分区

0143-8166

We have developed a high-throughput, tabletop ptychographic imaging system based on a high-order harmonic, extreme ultraviolet (EUV) light source. Driven by a 1.8 W, 180 fs, 4 kHz, 515 nm femtosecond laser, three neighboring high-order harmonics centered around 46.8 nm is obtained with a total power of 43 μW. Utilizing the light source without any monochromatization, we conducted multi-wavelength ptychography imaging with a large field of view (FOV) of 100 μm × 100 μm, and at a high rate of 0.4 Mpix/h.

EUV system HHG Ptychography

SCI ; EI

英语

其他

ENGINEERING

2-s2.0-85184838067

Scopus

1.Aerospace Information Research Institude,Chinese Academy of Sciences,Beijing,Beijing,100094,China
2.School of Optoelectronics,University of the Chinese Academy of Sciences,Beijing,Beijing,100049,China
3.Department of Electrical and Electronic Engineering,Southern University of Science and Technology,Shenzhen,Guangdong,518055,China
4.Yunnan University,Kunming,Yunnan,650500,China

Li，Kui,Lin，Huixiang,Niu，Jin,et al. Tabletop ptychographic imaging system with a 515 nm laser driven high-order harmonic source[J]. Optics and Lasers in Engineering,2024,176.

Li，Kui.,Lin，Huixiang.,Niu，Jin.,Xu，Hao.,Wang，Yutong.,...&Li，Jie.(2024).Tabletop ptychographic imaging system with a 515 nm laser driven high-order harmonic source.Optics and Lasers in Engineering,176.

Li，Kui,et al."Tabletop ptychographic imaging system with a 515 nm laser driven high-order harmonic source".Optics and Lasers in Engineering 176(2024).