南方科技大学知识苑(SUSTech KC): The surface softening mechanism of AlN ceramic by laser treatment

题名	The surface softening mechanism of AlN ceramic by laser treatment
作者	Xiong，Lingda 1; Wang，Chunjin 1; Wu，Wei 1; Xu，Linjiang 2; Wang，Chunming 2; Deng，Hui3 ; Cheung，Chi Fai 1
通讯作者	Wang，Chunjin
发表日期	2024-03-01
DOI	10.1016/j.surfin.2024.104023
发表期刊	Surfaces and Interfaces 影响因子和分区
ISSN	2468-0230
卷号	46
摘要	Aluminum Nitride ceramic is an excellent material for heat dissipation in electronic applications. The precision machining of AlN ceramic is difficult due to its high hardness and brittleness. To improve the machinability of the ceramic material, a microsecond laser was applied to soften the surface of AlN ceramic in this work. To reveal the surface softening mechanism of the laser processing of AlN ceramic, the phase composition, microstructure, processing depth and hardness variation of laser-treated AlN ceramic surface were studied. The phase transition and surface morphology evolution during laser treatment were explained. It was found that Al and AlO were formed on the surface after laser treatment. The surface hardness decreased from 14.3 GPa (base material) to 0.708 GPa. The revealed surface softening mechanism of laser treatment in this work is helpful for the optimization of the softening process and post-machining quality.
关键词	AlN ceramic Hardness variation Laser Phase transition Surface softening mechanism
相关链接	[Scopus记录]
收录类别	SCI
语种	英语
学校署名	其他
Scopus记录号	2-s2.0-85184596772
来源库	Scopus
引用统计	被引频次[WOS]：4
成果类型	期刊论文
条目标识符	http://sustech.caswiz.com/handle/2SGJ60CL/701362
专题	工学院_机械与能源工程系
作者单位	1.State Key Laboratory of Ultra-precision Machining Technology,Department of Industrial and Systems Engineering,The Hongkong Polytechnic University,Hung Hom,Hong Kong,China 2.School of Material Science and Engineering,Huazhong University of Science & Engineering,Wuhan,430074,China 3.Department of Mechanical and Energy Engineering,Southern University of Science and Technology,Shenzhen,No. 1088, Xueyuan Road, Guangdong,China
推荐引用方式 GB/T 7714	Xiong，Lingda,Wang，Chunjin,Wu，Wei,et al. The surface softening mechanism of AlN ceramic by laser treatment[J]. Surfaces and Interfaces,2024,46.
APA	Xiong，Lingda.,Wang，Chunjin.,Wu，Wei.,Xu，Linjiang.,Wang，Chunming.,...&Cheung，Chi Fai.(2024).The surface softening mechanism of AlN ceramic by laser treatment.Surfaces and Interfaces,46.
MLA	Xiong，Lingda,et al."The surface softening mechanism of AlN ceramic by laser treatment".Surfaces and Interfaces 46(2024).