Ultra-Low Contact Resistivity of < $0.1~\Omega\cdot$ mm for Au-Free TixAly Alloy Contact on Non-Recessed i-AlGaN/GaN

Fan，Meng Ya1; Yang，Gai Ying2,3; Zhou，Guang Nan2,3; Jiang，Yang2,3; Li，Wen Mao2,3; Jiang，Yu Long1; Yu，Hong Yu2,3,4

2020-01

10.1109/LED.2019.2953077

IEEE Electron Device Letters   影响因子和分区

1558-0563

Ohmic contact Ti???Al??? alloy AlGaN/GaN Au-free non-recessed

SCI ; EI

其他

20200308040473

Gold alloys ; Titanium alloys ; Binary alloys ; Electric contactors ; Aluminum alloys ; Gallium nitride ; III-V semiconductors ; Ohmic contacts

Aluminum Alloys:541.2 ; Titanium and Alloys:542.3 ; Precious Metals:547.1 ; Semiconducting Materials:712.1 ; Inorganic Compounds:804.2

ENGINEERING

IEEE

1.State Key Laboratory of ASIC and System,School of Microelectronics,Fudan University,Shanghai,200433,China
2.School of Microelectronics,Southern University of Science and Technology (SUSTech),Shenzhen,518055,China
3.GaN Device Engineering Technology Research Center of Guangdong,Southern University of Science and Technology (SUSTech),Shenzhen,518055,China
4.Key Laboratory of the Third Generation Semiconductor,Southern University of Science and Technology (SUSTech),Shenzhen,518055,China

Fan，Meng Ya,Yang，Gai Ying,Zhou，Guang Nan,et al. Ultra-Low Contact Resistivity of < $0.1~\Omega\cdot$ mm for Au-Free TixAly Alloy Contact on Non-Recessed i-AlGaN/GaN[J]. IEEE Electron Device Letters,2020,41(1):143-146.

Fan，Meng Ya.,Yang，Gai Ying.,Zhou，Guang Nan.,Jiang，Yang.,Li，Wen Mao.,...&Yu，Hong Yu.(2020).Ultra-Low Contact Resistivity of < $0.1~\Omega\cdot$ mm for Au-Free TixAly Alloy Contact on Non-Recessed i-AlGaN/GaN.IEEE Electron Device Letters,41(1),143-146.

Fan，Meng Ya,et al."Ultra-Low Contact Resistivity of < $0.1~\Omega\cdot$ mm for Au-Free TixAly Alloy Contact on Non-Recessed i-AlGaN/GaN".IEEE Electron Device Letters 41.1(2020):143-146.