Low-loss tantalum pentoxide photonics with a CMOS-compatible process

Zhaoting Geng1; Weiren Cheng1; Zhiwei Yan2; Qiyuan Yi2; Zhenyu Liu1; Mingjian You1; Xiaolun Yu1; Pengzhuo Wu1; Ning Ding1; Xingyu Tang1; Min Wang1; Li Shen2; Qiancheng Zhao1

2024-03-19

10.1364/OE.518545

Optics Express   影响因子和分区

1094-4087

We report a Ta2O5 photonic platform with a propagation loss of 0.49 dB/cm at 1550 nm, of 0.86 dB/cm at 780 nm, and of 3.76 dB/cm at 2000 nm. The thermal bistability measurement is conducted in the entire C -band for the first time to reveal the absorption loss of Ta2O5 waveguides, offering guidelines for further reduction of the waveguide loss. We also characterize the Ta2O5 waveguide temperature response, which shows favorable thermal stability. The fabrication process temperature is below 350 degrees C, which is friendly to integration with active optoelectronic components.

SCI ; EI

英语

第一 ; 共同第一 ; 通讯

National Natural Science Foundation of China[62205137] ; Guangdong Provincial Quantum Science Strategic Initiative[GDZX2304009] ; Basic and Applied Basic Research Foundation of Guangdong Province["2021B1515120074","2023A1515012141"] ; Wuhan National Laboratory for Optoelectronics[2021WNLOKF001] ; Shenzhen NSQKJJ[K23799109] ; State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Jiao Tong University, China[2024GZKF003]

Optics

Optics

WOS:001207065000005

Optica Publishing Group

PHYSICS

人工提交

正式出版

1.School of Microelectronics, MOE Engineering Research Center of Integrated Circuits for Next Generation Communications, Southern University of Science and Technology, Shenzhen, Guangdong 518000, China
2.Wuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China

Zhaoting Geng,Weiren Cheng,Zhiwei Yan,et al. Low-loss tantalum pentoxide photonics with a CMOS-compatible process[J]. Optics Express,2024,32(7):12291-12302.

Zhaoting Geng.,Weiren Cheng.,Zhiwei Yan.,Qiyuan Yi.,Zhenyu Liu.,...&Qiancheng Zhao.(2024).Low-loss tantalum pentoxide photonics with a CMOS-compatible process.Optics Express,32(7),12291-12302.

Zhaoting Geng,et al."Low-loss tantalum pentoxide photonics with a CMOS-compatible process".Optics Express 32.7(2024):12291-12302.