非晶合金柔性纳米压印模板的制备研究

AMORPHOUS METALS IN FLEXIBLE NANOIMPRINTING TEMPLATE FABRICATION

黄兴隆

11649106

硕士

材料学

程鑫

2018-06-04

2018-07-03

哈尔滨工业大学

深圳

本文以磁控溅射的 Zr 基非晶合金薄膜为基础，结合光刻、刻蚀、纳米压印以及镍电镀工艺，成功制备出了柔性非晶合金纳米压印模板。文章不仅开发了一种新型模板制备工艺，而且详细表征了非晶合金薄膜的微观结构与力学特征，模板的形貌和表面粗糙度以及耐腐蚀性能，并用模板进行了实际压印测试。XRD、 TEM 以 及 ICP-MS 对薄膜测试 的结果 表明，利用直流溅射Zr55Al10Ni5Cu30 靶而得到的薄膜为非晶态，其成分为 Zr33.85Al17.44Ni5Cu33.32，薄膜成分与靶材有明显区别，其溅射产额与元素的原子量有关。为了探究薄膜的力学性能，本文利用纳米压痕仪对其进行了测试，结果表明该非晶合金薄膜的杨氏模量约为 112.9 GPa，硬度约为 2.91 GPa，体现了非晶合金具有较高的杨氏模量和硬度的特点。文章通过 SEM 和 AFM 对柔性非晶合金模板进行了表征，并进一步试验了该模板在聚碳酸酯(PC)片上的压印性能。SEM 和 AFM 结果表明非晶合金模板不仅可以精确复制母模板的微纳结构，而且具有极好的表面粗糙度(Ra＜1 nm)。为了测试非晶合金模板的实际使用效果，本课题用该模板对 PC 片进行了热压印测试，压印图形的复制效果、精度以及表面质量都达到很高的使用要求。除此以外，本文还研究了非晶合金纳米压印模板和镍模板的耐光酸腐蚀性能对比，结果表明由于非晶合金独特的晶体结构，其耐酸腐蚀性能明显优于镍模板。这些性能预示着其在纳米压印光刻，特别是在卷对卷纳米压印光刻工艺中有着巨大的应用前景。该柔性非晶合金纳米压印模板确实是实际可用且性能优越的模板。

In this paper, we successfully fabricated a flexible amorphous metals nanoimprint template, based on magnetron sputtering of Zr-based amorphous metals film,photolithography, nanoimprinting and nickel electroplating process. The article not only developed a new template fabrication process, but also detailed 1) the microstructure and mechanical characteristics of the amorphous metal film, 2) the morphology, surface roughness and corrosion resistance of the template, 3) the result of actual nanoimprinting test as a template.The amorphous metal film was prepared by Zr-based metal magnetron sputtering. The XRD, TEM and ICP-MS measurements showed that the film obtained by DC sputtering of the Zr55Al10Ni5Cu30 target is amorphous and its composition is Zr33.85Al17.44Ni5Cu33.32. The film composition is obviously different from target. The sputtering yield is obviously related to the atomic weight of the element. Nano indenter was used to study the mechanical properties of the film. The results showedthat the Young's modulus of the amorphous alloy film is 112.9 GPa, and the hardness is 2.91 GPa, indicating that the amorphous alloy has a relatively high Young modulus and hardness.In this study, the amorphous alloy template was characterized by SEM and AFM, and the imprinting properties of the template on polycarbonate (PC) sheet were further characterized. The results showed that the prepared amorphous alloy template can not only accurately replicate the micro/nano structure of the master template but also has an extremely low surface roughness (Ra<1 nm). In addition, the photo-acid corrosion resistance of the amorphous alloy nanoimprint template, compared with thenickel template, was also studied. Due to the unique crystal structure of the amorphous alloy, its acid corrosion resistance is significantly better than the nickel template. These properties indicate that amorphous metal template has a huge application prospect in nanoimprint lithography, especially in the roll-to-roll nanoimprint lithography process. Finally, in order to test the actual use of the template, a hot imprint test was performed on the PC sheet. The results showed the quality of embossed pattern reproduction could meet the requirements for use, including the effect, precision, and surface quality and so on.

非晶合金 柔性模板 纳米压印光刻

amorphous metals flexiable template nanoimprint lithography

中文

联合培养

南方科技大学

黄兴隆. 非晶合金柔性纳米压印模板的制备研究[D]. 深圳. 哈尔滨工业大学,2018.