一种适用于质子交换膜燃料电池的MEMS湿度传感器的研制

DEVELOPMENT AND FABRICATION OF MEMS HUMIDITY SENSORS FOR PROTON EXCHANGE MEMBRANE FUEL CELL

梁旭

11649142

硕士

机械工程

王海江

2018-06-08

2018-07-05

哈尔滨工业大学

深圳

在近几年里，新兴能源中的质子交换膜燃料电池（ Proton Exchange Membrane Fuel Cells, PEMFC）具有良好的发展前景。不同于其他种类的燃料电 池，PEMFC拥有工作温度低、快速启动和零排放等优势。由于其在反应过程中质子必须和水分子结合才能进行正常的传递，所以质子交换膜的导电能力和湿度有关。只有时刻控制燃料电池内部的湿度处在一个理想的范围中，才能使其 有效的作业，因此了解质子交换膜燃料电池在有效作业状态下的湿度分布情况 就显得尤为重要。本文的主要研究在于设计并制备了一种适用于质子交换膜燃料电池内部 测量的电容性湿度传感器，针对不同材料和不同结构的湿度传感器进行的理论 探究和测量分析。主要研究内容如下：1.选择适合的传感器种类——电容性湿度传感器，并设计出传感器的结构，即三明治型。并根据选择的传感器种类和结构，选择合适的湿敏材料——聚酰 亚胺（PI）。2.根据设计的湿度传感器制作出相应的实验方案。主要步骤有：基片的清洗和氧化，在氧化层上溅射下电极，光刻出下电极图形电极，旋涂聚酰亚胺薄膜，制作上电极，焊接引线并标定等。并根据设计的方案制作出湿度传感器。3.利用制成的湿度传感器测试，首要测试的特征参数有湿滞特性、灵敏度、线性度等。通过测试发现该湿度传感器的有效测试范围为 10%RH—70%RH，在该范畴内其线性度为 1.9%，其灵敏度为 0.956pF/%RH。但在高湿条件下，该湿度传感器的性能较不理想。最后针对测试的结果进行合理的分析。

In recent years, Proton Exchange Membrane Fuel Cells (PEMFC) have a promising future as emerging energy sources. Compared with other types of fuel cells, PEMFCs have the advantages of low operating temperature, fast start-up and zero emissions. Since the protons must be combined with water molecules during the reaction to perform normal transfer, the conductivity of the proton exchange membrane is related to the humidity. Only by ensuring that the humidity inside the fuel cell is within a reasonable range at all times, can it work efficiently. Therefore, it is very important to understand the moisture distribution of proton exchange membrane fuel cells under working conditions.The main research of this dissertation is to design and prepare a capacitive humidity sensor suitable for the internal testing of proton exchange membrane fuel cells, and conduct theoretical research and test analysis on different materials and different structures of humidity sensors. The main research content is as follows:1. Select the appropriate type of sensor-capacitive humidity sensor, and design the structure of the sensor, that is, the sandwich type. According to the selected sensor type and structure, select the appropriate humidity sensitive material- Polyimide (PI).2. According to the design of the humidity sensor to make the appropriate experimental program. The main steps are: cleaning and oxidation of the substrate, sputtering of the lower electrode on the oxide layer, photolithography of the finger-type electrode, spin-coating of the polyimide film, fabrication of the upper electrode, soldering of the leads, and calibration. And according to the design of the program to fabricate a humidity sensor.3. Using the manufactured humidity sensor test, the main tested characteristic parameters are hysteresis characteristics, sensitivity, linearity, and the like. The test found that the humidity sensor's effective measurement range is 10%RH-70%RH, within this range its linearity is 1.9%, and its sensitivity is 0.956pF/%RH. However, under high humidity conditions, the performance of the humidity sensor is less than ideal. Finally, a reasonable analysis of the test results is performed.

质子交换膜燃料电池 湿度传感器 聚酰亚胺

Proton exchange membrane fuel cell Humidity sensor PI

中文

联合培养

南方科技大学

梁旭. 一种适用于质子交换膜燃料电池的MEMS湿度传感器的研制[D]. 深圳. 哈尔滨工业大学,2018.