一种超低温传感器测量与校准技术研究

随着量子科学领域的快速发展，研究人员对低温测量的需求越来越大。作者所在课题组承担的项目任务是稀释制冷机研发，随着设备性能的不断改进，当最低工作温度来到100 mK 以下时，原测量线路方案对于系统的漏热影响愈发明显，1 K 以下温度传感器的严重短缺更是无法忽视的实际困境。
为解决上述问题，本文首先对一些重要的低温温度传感器的原理、特点和适用场景进行了梳理和分析，其次对于低温实验可用的线材和热沉设计进行了调研，拟定了一种新测量线路设计方案。之后，搭建了一个基于稀释制冷机的超低温温度测量系统，并针对性开发了一款基于WinForms 的轻量实用的采集软件。
基于该系统，对原全磷铜线测量线路与经优化设计后的包含NbTi 超导线材的分段式的测量线路进行了搭载测试和对比，并使用新线路对RX-102B-RS 型氧化钌温度传感器进行测量实验，包括1 支厂商出厂校准的传感器以及4 支未经厂商校准的传感器。利用采集获得的10 mK-40 K 的温度范围内的温度与电阻数据，结合与制冷机原装传感器温度读数的对比分析，依据RX-102B-RS 型传感器的电阻响应的变化特点，确定了一组分段式拟合方程，通过拟合得到各传感器校准参数，
并生成校准文件导入仪器再次进行降温实验，以直观了解通过上述方案校准的传感器温度读数与厂商校准的传感器的读数偏差情况。
通过这一研究，详细总结了超低温温度测量实验的重要技术细节，成功对课题组设备研发使用的测量线路方案进行了改良设计，线路搭载后的制冷机MC 冷板的最低温度从50 mK 下降到10 mK，大幅改善了温度测量的准确度与下限。同时，利用搭建的测量系统进行温度测量实验，通过分段式拟合获得了4 支氧化钌温度传感器的校准曲线文件，经检验温度读数均能在标准温度计量程内保持良好一致性，为自研设备各部件的调整与优化提供有力保障。

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