基于显示的GaN Micro-LED器件效率优化与色转换技术研究

在现代显示技术领域，Micro-LED展示出巨大的应用潜力，尤其在高性能显示应用中表现引人注目。随着技术发展，进一步优化Micro-LED的器件效率和实现高质量的全彩显示成为了研究的重点。本论文深入探讨了Micro-LED在这两个关键领域的研究，旨在提供新的思路和解决方案。

在器件效率优化方面，论文首先通过修正表面复合的器件效率理论模型，深入分析了非辐射复合、辐射复合和俄歇复合这三个基本过程对Micro-LED器件性能的影响。修正后的模型不仅为理解Micro-LED的效率提供了一种全面的视角，还揭示了尺寸效应和表面状态如何影响器件的性能。基于这一理论框架，进一步探索了通过器件表面钝化处理以抑制表面非辐射复合，从而提高Micro-LED的发光效率和性能。

本文详细介绍了采用溶胶-凝胶法SiO₂钝化处理对Micro-LED表面进行优化的研究。该表面处理方法有效减少了表面缺陷密度，降低了非辐射复合损失（相较于PECVD钝化，理想因子降低了0.6），提升了器件的外量子效率（20 × 20 μm器件钝化后效率提高了13.4%）和表面发光均匀性。此外，利用KOH化学处理对Micro-LED器件侧壁形貌进行精细控制，改善了光提取效率，为实现高亮度和高效率的Micro-LED显示提供了有效的技术途径。同时，还制备了性能优越的5000 PPI超高分辨率Micro-LED阵列。

在全彩显示技术研究方面，本论文提出了一种创新的空心圆柱Micro-LED结构设计，以优化量子点的色转换效果。通过喷墨打印技术精确地将量子点集成到Micro-LED的内部空心圆柱结构中，实现了红光9600、绿光10000 nits的超高亮度，并且实现了更高的色转换效率（红光37.7%、绿光41.7%）。这种设计有效减少了蓝光泄漏比例（红光2.1%、绿光5.3%），同时简化了工艺，对于Micro-LED全彩显示具有重要意义。

综上所述，本论文的研究成果不仅深化了对Micro-LED器件效率和全彩显示技术的理解，还提供了针对性的优化策略和实用的技术方案。这些研究进展为Micro-LED技术的进一步发展奠定了坚实的理论和实验基础，也为未来高性能、高效率的显示技术提供了重要的技术支撑。

In the modern display technology field, Micro-LED technology, with its high efficiency, brightness, and longevity, has demonstrated immense potential, particularly in high-performance display applications. As technology advances, further optimization of Micro-LED device efficiency and the realization of high-quality full-color displays have become key research areas. This dissertation systematically analyzes and experimentally validates technological progress in these two crucial areas of Micro-LED, aiming to provide new insights and solutions for future developments.

Regarding device efficiency optimization, this dissertation first refines the surface recombination theory model to deeply analyze the impact of non-radiative recombination, radiative recombination, and Auger recombination on Micro-LED performance. The establishment of this model not only offers a comprehensive perspective for understanding the efficiency of Micro-LEDs but also reveals how size effects and surface states influence device performance. Based on this theoretical framework, the dissertation further explores the optimization of these recombination processes through improved material surface treatment and sidewall structure morphology, thereby enhancing the luminous efficiency and performance of Micro-LEDs.

This study details the optimization of Micro-LED surfaces using the sol-gel method SiO₂ passivation treatment. These surface treatment methods effectively reduce surface defect density and non-radiative recombination losses, significantly improving the device's external quantum efficiency (20 × 20 μm devices showed a 13.4% improvement) and surface luminance uniformity. Additionally, the application of KOH chemical treatment for precise control over the Micro-LED device's sidewall morphology further improves light extraction efficiency, providing an effective technical pathway for achieving high brightness and high-efficiency Micro-LED displays. The study also successfully prepared high-performance 5000 PPI ultra-high resolution Micro-LED arrays.

Regarding full-color display technology research, this dissertation proposes an innovative hollow cylindrical Micro-LED structure design to optimize the color conversion efficiency of quantum dots. By precisely integrating quantum dots into the internal hollow cylindrical structure of Micro-LEDs using inkjet printing technology, it achieves ultra-high brightness for red (9600 nits) and green (10000 nits) light, and higher color conversion efficiency (37.7% for red and 41.7% for green). This design also reduces blue light leakage (2.1% for red and 5.3% for green) while simplifying the production process, which is of significant importance for advancing the commercialization of Micro-LED full-color display technology.

In summary, the research findings of this dissertation deepen the understanding of Micro-LED device efficiency and full-color display technology while providing targeted optimization strategies and practical technical solutions. These advancements lay a solid theoretical and experimental foundation for the further development of Micro-LED technology and provide significant technical support for the future of high-performance, high-efficiency display technology.

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