南方科技大学知识苑(SUSTech KC): 基于折叠叉指电极的柔性压力传感器

题名	基于折叠叉指电极的柔性压力传感器
其他题名	FLEXIBLE PRESSURE SENSOR BASED ON FOLDED INTERDIGITAL ELECTRODE
姓名	吴佳鑫
姓名拼音	WU Jiaxin
学号	12132478
学位类型	硕士
学位专业	0856 材料与化工
学科门类/专业学位类别	08 工学
导师	王敏
导师单位	深港微电子学院
论文答辩日期	2024-05-06
论文提交日期	2024-06-26
学位授予单位	南方科技大学
学位授予地点	深圳
摘要	柔性压力传感器在智能机器人、可穿戴设备、人机交互等领域有广阔的应用前景。压阻式柔性压力传感器因其原理简单、响应信号易于读出和处理而受到研究人员的广泛关注。当前对于高灵敏度压阻式压力传感器的需求巨大。前人的研究主要通过设计压阻材料和器件结构来提升灵敏度，然而多数传感器在 100 kPa 以上的高压范围内的灵敏度较低。本文提出一种折叠叉指电极压力传感器来解决这一问题。主要研究内容如下：（1）提出通过折弯柔性叉指电极以实现具有多层堆叠结构的柔性压阻式压力传感器。经理论分析，阐述该压力传感器的电学工作原理，包括由单敏感层实现压力传感的原理和多个导电敏感层之间的电学关系。通过力学仿真，确定了单个电极折弯结构的受压形变过程以及在该过程中敏感层与电极的接触面积随压力变化的关系，并进一步分析了折弯结构的多层堆叠对器件灵敏度的提升作用。（2）将定制的柔性叉指电极的铜层减薄，以降低结构刚度，便于模压折弯。折弯的电极将与纸基导电敏感材料组装为一体，再以堆叠形式封装该组装体，制备压力传感器。其灵敏度在 3.6~714.3 kPa 范围内不低于 300 kPa-1，最高为 1431.7 kPa-1，明显优于传统的三明治结构器件及前人的相关工作，表明本文的传感器在宽的测量范围内，特别是 100 kPa 以上的高压范围内，保持着较高的灵敏度。同时，设计了正交实验研究敏感层的导电性、叉指电极的线宽线距及电极的接线方式对传感器的灵敏度和线性度的影响。此外，成功展示了使用该传感器控制 LED 灯亮度和检测手指弯曲程度的应用场景。在前人的工作中，压阻式压力传感器的敏感层与电极的接触面积在高压范围内易饱和，造成灵敏度下降。为此，本文提出了一种通过折弯叉指电极实现具有多层堆叠结构的柔性压阻式压力传感器，以提高接触面积和响应电流在整个压力测量范围内的变化量，从而提高器件在宽量程范围内的灵敏度。本研究对新型高灵敏度压力传感器的结构设计、制备和性能提升有一定的工程价值和指导意义。
其他摘要	Flexible pressure sensors have broad application prospects in intelligent robots, wearable devices, human-machine interaction and other fields. The piezoresistive pressure sensors have attracted wide attention because of their simple structure and readout mechanism. There are great application requirements of piezoresistive pressure sensors with high sensitivity. Many researchers have focused on the design of piezoresistive material and sensor structure to improve the sensitivity. However, most sensors have low sensitivity in the high pressure range above 100 kPa. In this paper, a novel pressure sensor structure is proposed to solve this problem. The main research contents are as follows: (1) A flexible piezoresistive pressure sensor with multilayer stacked structure is proposed by bending the flexible interfinger electrode. The electrical working principle of the pressure sensor is described by theoretical analysis, including the principle of pressure sensing by a single sensitive layer and the electrical relationship between multiple conductive sensitive layers. Through mechanical simulation, the deformation process of a single electrode bending structure is established. We also figure out the relationship between the contact area of a single sensitive layer and the electrode and the pressure. Moreover, the effect of multilayer stacking on the sensitivity of the device is analyzed. (2) In order to bend the flexible interdigital electrode by mold pressing as well as reduce the structural stiffness, the copper layer of the customized flexible interfinger electrode is thinned down to several micrometer. The bent electrode is assembled with a paper-based conductive sensitive material, and then the assembly is packaged in a stacked form to prepare the prototype of sensor. The sensitivities of prototypes with different conductive layers are not less than 300 kPa-1 in the range of 3.571-714.286 kPa with a maximum value of 1431.7kPa-1, which is obviously better than the sandwiched sensor and previous researches. In addition, a demonstration is made where the sensor is used to control the LED brightness. In the previous research, the contact area between the sensitive layer and the electrode of the pressure sensor is saturated in the high pressure range. Therefore, a flexible piezoresistive pressure sensor with bent interfinger electrode and multilayered stacked structure is proposed in this paper, which increases the variation of the contact area and response current in the high pressure range, so as to improve the sensitivity of the device.. It has certain engineering value and guiding significance for the structural design, fabrication and performance improvement of new high-sensitivity pressure sensors.
关键词	折弯电极多层堆叠结构高灵敏度压阻式压力传感器
其他关键词	Bent Electrode Multilayer Stacked Structure High Sensitivity Piezoresistive Pressure Sensor
语种	中文
培养类别	独立培养
入学年份	2021
学位授予年份	2024-06
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所在学位评定分委会	材料与化工
国内图书分类号	TP212.1
来源库	人工提交
成果类型	学位论文
条目标识符	http://sustech.caswiz.com/handle/2SGJ60CL/766121
专题	南方科技大学-香港科技大学深港微电子学院筹建办公室
推荐引用方式 GB/T 7714	吴佳鑫. 基于折叠叉指电极的柔性压力传感器[D]. 深圳. 南方科技大学,2024.

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