钛合金超声增强等离子体氧化辅助磨削加工方法研究

钛合金因具备比强度大、耐腐蚀性强和抗疲劳性好等优异性能，在航空航天、国防兵器、生物医学和消费电子等领域备受重视。磨削加工作为钛合金精密成型的必要工艺，占总工艺的60%以上。然而，钛合金高温下强度高、弹性模量低和热传导系数低等属性造成磨削过程磨削力大、材料去除比率低和砂轮粘附严重等问题，严重阻碍着钛合金零部件的广泛应用。为解决此问题，本文提出超声增强等离子体氧化辅助磨削加工技术。该技术充分发挥等离子体氧化对钛合金的软脆效应和超声对等离子体氧化的增强作用，将超声振动增强等离子体氧化应用于钛合金的端面和周面磨削中。本文针对该技术开发了相应的实验系统，并对其基本加工特性展开了系统研究。

首先，阐述了超声增强等离子体氧化辅助端/周磨的加工原理。根据辅助端/周磨的加工原理制定了相应的工艺流程。在辅助端磨中，详细介绍了自行研制的超声射流喷嘴的设计过程；在辅助周磨中，阐述了磨削过程中避免产生电火花的条件。通过研究不同溶液下工件表面等离子体的激发现象，阐明了阳极氧化层和极间气泡在等离子体的激发过程发挥着重要作用，而电解液的气液状态影响着阳极氧化层和极间气泡的产生。在辅助端/周磨中，将超声振动均施加于电解液上以改变其气液状态，在此情况下探究超声振动对等离子体氧化的增强作用。

随后，研究了超声增强等离子氧化辅助端磨的基本加工特性。借助静态射流等离子体氧化实验揭示了电源参数（电压幅值、频率和占空比）和溶液浓度对等离子体强度的调制机制。通过研究溶液种类对等离子体氧化层生长方向的影响，发现Na₂SO₄溶液下的等离子体氧化层主要由基体变质而来，呈现向内生长。在此基础上，选用Na₂SO₄溶液制备等离子体氧化层，硬度测试和XRD探测结果表明等离子体氧化可对钛合金产生软脆效应，刻划实验也验证了等离子体氧化层的机械强度相对于钛合金基体有所降低。从磨粒切削对象的角度出发，对比了传统端磨、等离子体氧化辅助端磨和超声增强等离子体氧化辅助端磨的磨削力、表面粗糙度和沟槽形状精度，挖掘出磨粒切削等离子体氧化层时加工性能的提升机制。

进一步，研究了超声增强等离子氧化辅助周磨的基本加工特性。借助原子力显微镜考察载荷与钛合金表面划痕形貌特征（深度和体积）演变的关系。理论分析得知磨削运动参数（切深Δ、砂轮线速度v_w和工件进给速度v_s）通过控制最大未变形磨屑厚度t_m和氧化层厚度t_o之间的关系决定磨粒的切削对象，并利用磨削后工件表面残留氧化层的有无进行了验证。在此基础上，研究工艺参数对磨削力、材料去除比率和表面粗糙度的影响，揭示了超声振动增强等离子体氧化下的加工性能提升机制。

最后，研究了超声增强等离子体氧化辅助磨削下磨粒和工件材料之间的相互作用。通过观测砂轮表面的粘附状态和加工表面微观形貌，分析得到辅助端/周磨中磨粒和工件材料之间的相互作用模型，揭示出辅助端/侧中的砂轮粘附抑制和表面微观形貌创成的内在机制。

本文的研究证明了超声增强等离子体氧化辅助磨削的可行性，为该技术的应用发展提供了相应的理论基础，同时也为钛合金的高效精密加工提供了一种新的加工路线，对促进钛合金关键零部件的应用具有一定的意义。

Titanium alloys have been widely used in aerospace, national defense, biomedical, and consumer electronics due to their excellent properties, such as high specific strength, strong corrosion resistance, and good fatigue resistance. Grinding is necessary for titanium alloy precision machining, accounting for more than 60% of the total machining process. However, high strength at the elevated temperature, low elastic modulus, and low thermal conductivity of titanium alloys perform high grinding force, low material removal rate, and severe chip adhesion on the wheel working surface in the grinding process, which seriously hinders the broad application of critical components made from titanium alloy. To address this problem, a novel machining technology, namely ultrasonic-enhanced plasma oxidation grinding (UEPOG), was proposed in this paper. Taking full advantage of the soft-brittle effect of the plasma oxidation on the titanium alloys and the promotion effect of ultrasonic vibration on the plasma oxidation, the UEPOG applied the ultrasonic vibration and plasma oxidation to the face and peripheral grinding. In this paper, the corresponding experimental device was developed, and the fundamental processing characteristics of the UEPOG were systematically investigated.

Firstly, the processing principle of ultrasonic-enhanced plasma oxidation face/peripheral grinding was described, and the corresponding processes were formulated. In face grinding, the design process of the in-house ultrasonic jet nozzle was introduced in detail. In peripheral grinding, the condition to avoid electric discharge was introduced. By recording the excitation phenomena of the plasma on the workpiece surface under different electrolytes, it was demonstrated that the anodic oxide layer and bubbles between the electrodes might play a significant role in plasma generation. In general, the generation of the anodic oxide layer and bubbles was associated with the gas-liquid state of the electrolyte. Hence, the ultrasonic vibration was applied to the electrolyte to change its gas-liquid state. In this case, the enhancement effect of the ultrasonic vibration on the plasma was investigated.

Then, the fundamental machining characteristics of ultrasonic-enhanced plasma oxidation face grinding were studied. The modulation mechanism of the power supply parameters (i.e., amplitude, frequency, and duty ratio of voltage) and the electrolyte concentration on the plasma intensity were revealed using the static jet plasma oxidation test. The effects of electrolyte type on the growth direction of the plasma oxide layer were explored. It was found that the plasma oxide layer, which was mainly modified from the Ti-6Al-4V substrate, exhibited an inward growth in the Na₂SO₄ solution. On this basis, the Na₂SO₄ solution was used to prepare the plasma oxide layer on the Ti-6Al-4V workpiece. The hardness test and XRD detection results showed that plasma oxidation can produce a soft-brittle effect on titanium alloy. Moreover, the scratching test demonstrated that the mechanical strength of the plasma oxide layer was lower than that of the titanium alloy substrate. From the point of view of the removed material of abrasive grains, the grinding force, surface roughness, and groove shape accuracy of conventional face grinding, plasma oxidation face grinding, and ultrasonic-enhanced plasma oxidation face grinding were compared. The improvement mechanism of grinding performance was discovered by removing the plasma oxide layer.

Further, the fundamental processing characteristics of ultrasonic-enhanced plasma oxidation peripheral grinding were studied. Employing atomic force microscopy, the relationship between the normal load and the evolution of scratch characteristics on the surface of titanium alloy samples was investigated. Theoretical analysis showed that grinding parameters (i.e., depth of cut Δ, wheel peripheral speed v_s, and workpiece feed speed v_w) determine the removed material of abrasive grains by controlling the relationship between the maximum thickness t_m of the undeformed chip and the thickness t_o of the oxide layer. The presence and absence of the residual oxide layer on the ground workpiece surface verified this analysis. On this basis, the effects of processing parameters on grinding force, actual material removal ratio, and surface roughness were studied, and the improvement mechanism of grinding performance was revealed under the enhancement effect of the ultrasonic vibration on plasma oxidation.

Finally, the interaction between abrasive grains and oxidation material was explored. By observing the chip adhesion on the wheel’s working surface and the micro morphology of the ground workpiece surface, the interaction model between the abrasive grains and the workpiece material in the face/peripheral grinding was respectively proposed. Moreover, the internal mechanism of the inhibition of the chip adhesion on the wheel’s working surface and the formation of the surface morphology in the face/peripheral grinding were revealed.

The study in this paper proved the feasibility of ultrasonic-enhanced plasma oxidation grinding. It provided the corresponding theoretical basis for the application and development of this novel technology, which had a particular significance for promoting the application of critical components made from titanium alloy.

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