碲化铋基红外热电堆器件设计与探测性能研究

随着微机械系统（MEMS）工艺技术的发展，热电堆红外传感器在民用

和军事领域的应用日益广泛。由于其无需斩波器和制冷装置、具有体积小、

低成本、低噪声等优点，热电堆红外探测器吸引了众多学者的关注。然而，

在热电堆红外探测器的设计中，多数采用硅基材料作为热电偶材料，其较低

的热电性能导致器件性能与其他红外探测器相比存在较大差距。

为解决上述问题，本研究根据热电堆的性能参数，提出了热电堆敏感元

材料的响应优值和探测优值的概念，并以此为基准对各类候选半导体材料进

行了筛选。随后，利用碲化铋材料作为敏感元材料，采用有限元仿真的方法

设计了方形结构和圆形结构的碲化铋基热电堆红外传感器。通过仿真预测不

仅使得探测器对红外辐射的热响应得以直观展现，而且通过热偶条长度、宽

度、厚度以及数量的尺寸优化，实现了小体积、高性能的热电堆红外传感器

结构优化。优化后的器件响应率达到 3071.37 V/W，探测率达到 1.126×1010

cmHz1/2W-1，均超过了现有商用硅基热电堆探测器一个数量级以上。

根据设计的结构模型，本研究采用磁控溅射和掩膜法，制备了基于碲化

铋薄膜的热电堆红外探测器。通过搭建实验平台，对该器件的红外响应进行

了测试。此外，建立了面外型碲化铋敏感元热电堆红外探测器的仿真模型，

响应时间仅 0.937 ms，与面内型相比提升了三个数量级，研究了热电偶厚度

和填充材料对探测器性能的影响，最终优先考虑聚亚酰胺作为填充材料，为

今后面外型器件的应用提供了一定的研究基础。

本研究揭示了碲化铋敏感元材料在热电堆传感器中的巨大潜力，有望推

动新型 MEMS 热电堆传感器的跨越式发展。

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